Measurement of free radical kinetics in pulsed plasmas by UV and VUV absorption spectroscopy and by modulated beam mass spectrometry

Plasma Sources Science and Technology

Volumn 21, Issue 2, 2012, Pages

  Cunge, G ^a   Bodart, P ^a   Brihoum, M ^a   Boulard, F ^a   Chevolleau, T ^a   Sadeghi, N ^a  

^a Laboratoire Interdisciplinaire de Physique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BROAD BANDS; ETCHING PLASMA; HIGH-DENSITY; LOSS MECHANISMS; PULSED DISCHARGE; PULSED PLASMA; RADICAL KINETICS; REACTIVE SPECIES; RECENT PROGRESS; SPECTRAL DOMAINS; THRESHOLD IONIZATION; TIME RESOLVED MEASUREMENT; TIME VARIATIONS; TIME-RESOLVED; UV- AND; VACUUM ULTRAVIOLETS;

CHLORINE; FREE RADICALS; MASS SPECTROMETRY; PLASMAS;

ELECTRIC DISCHARGES;

EID: 84859586437     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/21/2/024006     Document Type: Article

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