Atmospheric plasmas for thin film deposition: A critical review

Thin Solid Films

Volumn 520, Issue 13, 2012, Pages 4219-4236

  Merche, Delphine ^a   Vandencasteele, Nicolas ^a   Reniers, François ^a  

^a UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

Author keywords

APECVD; Atmospheric plasma; Deposition; Hybrid coatings; Inorganic coatings; Organic coatings; Plasma polymerization

Indexed keywords

APECVD; ATMOSPHERIC DISCHARGE; ATMOSPHERIC PLASMA; ATMOSPHERIC PLASMAS; CRITICAL REVIEW; HYBRID COATING; THIN-FILM DEPOSITIONS;

DEPOSITION; ELECTRIC DISCHARGES; INORGANIC COATINGS; PLASMA DEPOSITION; PLASMA POLYMERIZATION;

ORGANIC COATINGS;

EID: 84859210005     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2012.01.026     Document Type: Review

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