Growth and characterization of well-aligned densely-packed rutile TiO2 nanocrystals on sapphire (100) and (012) substrates by reactive magnetron sputtering

Thin Solid Films

Volumn 518, Issue 15, 2010, Pages 4121-4125

  Yeh, C N ^a   Chen, Y M ^a   Chen, C A ^a   Huang, Y S ^a   Tsai, D S ^a   Tiong, K K ^b  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

Oxides; Raman scattering; Reactive magnetron sputtering; Titanium dioxide; X ray photoelectron spectroscopy

Indexed keywords

AS-GROWN; BULK COUNTERPART; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; METAL TARGET; MICRO RAMAN SPECTROSCOPY; NANOCRYSTALLINE RUTILE; PEAK POSITION; RAMAN SPECTRA; REACTIVE MAGNETRON SPUTTERING; RED SHIFT; RUTILE PHASE; RUTILE TIO; SPECTROSCOPIC PROPERTY; SUBSTRATE EFFECTS; TILT ANGLE; TIO; VERTICALLY ALIGNED; WELL-ALIGNED; XPS ANALYSIS; XRD;

ELECTRONS; MAGNETRON SPUTTERING; NANOCRYSTALS; OXIDE MINERALS; OXYGEN; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

SUBSTRATES;

EID: 77953142902     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.11.014     Document Type: Article

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