Preparation of TiO2 powder using titanium tetraisopropoxide decomposition in a plasma enhanced chemical vapor deposition (PECVD) reactor

Journal of Materials Science Letters

Volumn 18, Issue 16, 1999, Pages 1319-1321

  Ayllon J A ^a   Figueras, A ^b   Garelik, S ^b   Spirkova, L ^c   Durand, J ^c   Cot, L ^c  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

^c UNIVERSITÉ DE MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTAL STRUCTURE; INFRARED SPECTROSCOPY; ISOTHERMS; MORPHOLOGY; POWDERS; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE; TITANIUM DIOXIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY POWDER DIFFRACTION;

BRUNAUER-EMMETT-TELLER METHOD; SURFACE AREA; TITANIUM TETRAISOPROPOXIDE;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0033172196     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006657510154     Document Type: Article

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