Investigation of the atmospheric RF torch-barrier plasma jet for deposition of CeOx thin films

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 571-574

  Soukup, L ^a   Hubicka Z ^a   Churpita, A ^b   Cada M ^a   Pokorny P ^a   Zemek, J ^a   Jurek, K ^a   Jastrabik L ^a  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

Author keywords

Atmospheric plasma jet; Cerium oxide thin films; Emission spectroscopy

Indexed keywords

AEROSOLS; ALUMINUM; ATMOSPHERIC PRESSURE; COATINGS; DEPOSITION; EMISSION SPECTROSCOPY; PLASMA JETS; PLASMA TORCHES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON MICROPROBES;

CERIUM COMPOUNDS;

CESIUM OXIDE; COATING; DEPOSITION; FILM; PLASMA TREATMENT; SURFACE TREATMENT;

EID: 0038009191     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00097-5     Document Type: Article

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