Atmospheric plasma deposition of diamond-like carbon coatings

Diamond and Related Materials

Volumn 18, Issue 9, 2009, Pages 1129-1133

  Ladwig, Angela M ^a,b   Koch, Ronald D ^a   Wenski, Edward G ^a   Hicks, Robert F ^b  

^a NA 511   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Atmospheric pressure plasma; Diamond like carbon deposition; DLC; PECVD

Indexed keywords

ATMOSPHERIC PLASMA DEPOSITION; ATMOSPHERIC PRESSURE PLASMA; ATMOSPHERIC PRESSURE PLASMAS; COEFFICIENT OF FRICTIONS; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON COATINGS; DIAMOND-LIKE CARBON DEPOSITION; DLC; DLC COATINGS; LINEAR PLASMA SOURCES; PECVD; RADIO FREQUENCY POWER; SOLID-STATE CARBON; SUBSTRATE TEMPERATURE;

ACETYLENE; ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; DIAMONDS; HELIUM; HYDROGEN; LIGHTING; MAGNETIC RESONANCE; NUCLEAR MAGNETIC RESONANCE; PLASMA DEPOSITION; PLASMA SOURCES; VACUUM DEPOSITED COATINGS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 67649647642     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2009.02.026     Document Type: Article

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