Deposition of carbon-free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet

Applied Physics Letters

Volumn 92, Issue 9, 2008, Pages

  Raballand, V ^a   Benedikt, J ^a   Von Keudell, A ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; POLYMERIZATION; SILICA; X RAY PHOTOELECTRON SPECTROSCOPY;

MICROPLASMA JETS; OXYGEN ADMIXTURE; ROOM TEMPERATURE;

JETS;

EID: 40549094316     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2844880     Document Type: Article

References (26)

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