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Volumn 204, Issue 5, 2009, Pages 667-675
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Atmospheric pressure barrier torch discharge and its optimization for flexible deposition of TiO2 thin coatings on various surfaces
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Author keywords
Atmospheric plasma; Optical emission spectroscopy; PECVD; Thin layers; Titanium dioxide
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Indexed keywords
ACTIVE SPECIES;
ATMOSPHERIC PLASMAS;
ATMOSPHERIC PRESSURE GLOW DISCHARGE;
ATMOSPHERIC-PRESSURE BARRIER-TORCH DISCHARGE;
CRYSTALLINITIES;
CRYSTALLOGRAPHIC STRUCTURE;
DEPOSITION CONDITIONS;
DEPOSITION PROCESS;
EMISSION SPECTRUMS;
PHOTO-CATALYTIC;
PHOTOCATALYTIC OXIDATIONS;
PLASMA ENVIRONMENTS;
PLASMA PARAMETER;
PLASMA STREAMS;
QUALITATIVE ANALYSIS;
QUARTZ SLIDES;
RECOMBINATION REACTIONS;
RHODAMINE B;
SUPPORTING SURFACES;
SURFACE WETTABILITY;
THIN COATING;
THIN LAYERS;
TIO;
UV RADIATION;
ATMOSPHERIC CHEMISTRY;
ATMOSPHERIC PRESSURE;
CHEMICAL MODIFICATION;
EMISSION SPECTROSCOPY;
FILM PREPARATION;
GLOW DISCHARGES;
GRAFTING (CHEMICAL);
LIGHT EMISSION;
OPTICAL EMISSION SPECTROSCOPY;
OXIDE FILMS;
OXIDE MINERALS;
PHOTOCATALYSIS;
PHOTORESISTS;
PHYSICAL PROPERTIES;
PLASMA DEPOSITION;
PLASMAS;
QUARTZ;
SURFACE CHEMISTRY;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
SYNTHESIS (CHEMICAL);
THIN FILMS;
TITANIUM;
TITANIUM DIOXIDE;
TITANIUM OXIDES;
ULTRAVIOLET RADIATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
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EID: 71749083995
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2009.09.007 Document Type: Article |
Times cited : (29)
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References (32)
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