Recent advances in magnetron sputtering

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 170-176

  Arnell, R D ^a   Kelly, P J ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Magnetron sputtering; Pulsed DC sputtering; Structure zone modelling

Indexed keywords

AEROSPACE APPLICATIONS; CERAMIC COATINGS; CORROSION RESISTANCE; MATHEMATICAL MODELS; PROTECTIVE COATINGS; THERMODYNAMIC PROPERTIES; WEAR RESISTANCE;

CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING (CFUBMS); HARD COATINGS; PULSED DIRECT CURRENT SPUTTERING; STRUCTURE ZONE MODELING;

MAGNETRON SPUTTERING;

EID: 0033075695     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00749-X     Document Type: Article

References (22)

1. J.L. Vossen, W. Kern (Eds.), Thin Film Processes II, Academic Press, London, 1991.
2. Window B., Savvides N. J. Vac. Sci. Technol. A. 4(2):1986;196-201.
3. Window B., Savvides N. J. Vac. Sci. Technol. A. 4(2):1986;453-456.
4. Savvides N., Window B. J. Vac. Sci. Technol. A. 4(2):1986;504-508.
5. D.P. Monaghan, K.C. Laing, P.A. Logan, D.G. Teer, Finishing, Nov. 1993.
6. Howson R.P., Spencer A.G., Oka K., Lewin R.W. J. Vac. Sci. Technol. A. 7(3):1989;1230-1234.
7. Wong M.S., Chia W.J., Yashar P., Schneider J.M., Sproul W.D., Barnett S.A. Surf. Coat. Technol. 86/87:1996;381-387.
8. Monaghan D.P., Teer D.G., Logan P.A., Efeoglu I., Arnell R.D. Surf. Coat. Technol. 60:1993;525-530.
9. Baldwin K.R., Bates R.I., Arnell R.D., Smith C.J.E. Corrosion Science. 38(1):1996;155-170.
10. Thornton J.A. J. Vac. Sci. Technol. 11(4):1974;666-670.
11. Messier R., Giri A.P., Roy R.A. J. Vac. Sci. Technol. A. 2(2):1984;500-503.
12. Musil J., Kadlec S., Valvoda V., Kuzel R., Cerny R. Surf. Coat. Technol. 43/44:1990;259-269.
13. Craig S., Harding G.L. J. Vac. Sci. Technol. 19(2):1981;205-215.
14. Kelly P.J., Arnell R.D. J. Vac. Sci. Technol. A. 16:1998;2858-2869.
15. R. Roy, A Primer on the Taguchi Method, Van Norstrand Reinhold, New York, 1990.
16. Kay E., Parmigiani F., Parrish W. J. Vac. Sci. Technol. A. 6(6):1988;3074-3081.
17. S. Munsterer, K. Kohloff, in: G. Hecht, F. Richter, J. Hahn (Eds.), Thin Films, DGM Informationsgesellschaft, Verlag, 1994, pp. 121-126.
18. Sproul W.D. J. Vac. Sci. Technol. A. 12(4):1994;1595-1601.
19. Petrov I., Adibi F., Greene J.E., Sproul W.D., Munz W.-D. J. Vac. Sci. Technol. A. 10(5):1992;3283-3287.
20. Adibi F., Petrov I., Greene J.E., Hultman L., Sundgren J.E. J. Appl. Phys. 73(12):1993;8580-8589.
21. Schiller S., Goedicke K., Reschke J., Kirchoff V., Schneider S., Milde F. Surf. Coat. Technol. 61:1993;331-337.
22. Kelly P.J., Abu-Zeid O.A., Arnell R.D., Tong J. Surf. Coat. Technol. 86/87:1996;28-32.