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Thin Solid Films

Volumn 519, Issue 19, 2011, Pages 6258-6263

The influence of methanol addition during the film growth of SnO 2 by atmospheric pressure chemical vapor deposition

(4) Volintiru, I a De Graaf, A a Van Deelen, J a Poodt, P a

a TNO (Netherlands)

Author keywords

APCVD; TCO; Tin oxide

Indexed keywords

APCVD; ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION; CHEMICAL VAPOR DEPOSITION REACTORS; DEPOSITION PROCESS; FILM TRANSPARENCY; HIGH MOBILITY; MAIN EFFECT; POINT FLOWS; TCO;

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; COALESCENCE; CONDUCTIVE FILMS; ELECTRIC PROPERTIES; METHANOL; OXIDE FILMS; PRESSURE EFFECTS; TIN; TIN OXIDES; VANADIUM;

FILM GROWTH;

EID: 79958192748 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.03.125 Document Type: Article

Times cited : (31)

References (41)

1
- 13244295856
- G. Eranna, B.C. Joshi, D.P. Runthala, and R.P. Gupta Crit. Rev. Solid State 29 2004 111
- (2004) Crit. Rev. Solid State , vol.29 , pp. 111
- Eranna, G.¹ Joshi, B.C.² Runthala, D.P.³ Gupta, R.P.⁴

2
- 34547899940
- C.G. Granqvist Sol. Energy Mater. Sol. Cells 91 2007 1529
- (2007) Sol. Energy Mater. Sol. Cells , vol.91 , pp. 1529
- Granqvist, C.G.¹

3
- 7044264973
- R.E. Presley, C.L. Munsee, C.H. Park, D. Hong, J.F. Wager, and D.A. Keszler J. Phys. D Appl. Phys. 37 2004 2810
- (2004) J. Phys. D Appl. Phys. , vol.37 , pp. 2810
- Presley, R.E.¹ Munsee, C.L.² Park, C.H.³ Hong, D.⁴ Wager, J.F.⁵ Keszler, D.A.⁶

4
- 61649083947
- D.W. Sheel, H.M. Yates, P. Evans, U. Dagkaldiran, A. Gordijn, F. Finger, Z. Remes, and M. Vanecek Thin Solid Films 517 2009 3061
- (2009) Thin Solid Films , vol.517 , pp. 3061
- Sheel, D.W.¹ Yates, H.M.² Evans, P.³ Dagkaldiran, U.⁴ Gordijn, A.⁵ Finger, F.⁶ Remes, Z.⁷ Vanecek, M.⁸

5
- 49149091965
- A.K. Singh Phys. Rev. Lett. 101 2008 0555502
- (2008) Phys. Rev. Lett. , vol.101 , pp. 0555502
- Singh, A.K.¹

6
- 0035897266
- K.S. Kim, S.Y. Yoon, W.J. Lee, and K.H. Kim Surf. Coat. Technol. 138 2001 229
- (2001) Surf. Coat. Technol. , vol.138 , pp. 229
- Kim, K.S.¹ Yoon, S.Y.² Lee, W.J.³ Kim, K.H.⁴

7
- 0030218673
- T. Ishida, S. Tamura, S. Mochizuki, T. Mihara, O. Tabata, J.I. Park, S.H. Shin, and H. Magara Thin Solid Films 281-282 1996 228
- (1996) Thin Solid Films , vol.281-282 , pp. 228
- Ishida, T.¹ Tamura, S.² Mochizuki, S.³ Mihara, T.⁴ Tabata, O.⁵ Park, J.I.⁶ Shin, S.H.⁷ Magara, H.⁸

8
- 1542366619
- C. Agashe, O. Kluth, J. Hupkes, U. Zastrow, B. Rech, and M. Wuttig J. Appl. Phys. 95 2004 1911
- (2004) J. Appl. Phys. , vol.95 , pp. 1911
- Agashe, C.¹ Kluth, O.² Hupkes, J.³ Zastrow, U.⁴ Rech, B.⁵ Wuttig, M.⁶

9
- 66049152118
- C. Agashe, J. Hüpkes, G. Schöpe, and M. Berginski Sol. Energy Mater. Sol. Cells 93 2009 1256
- (2009) Sol. Energy Mater. Sol. Cells , vol.93 , pp. 1256
- Agashe, C.¹ Hüpkes, J.² Schöpe, G.³ Berginski, M.⁴

10
- 33847179491
- B.-Z. Donga, and G.-J. Fang J. Appl. Phys. 101 2007 033713
- (2007) J. Appl. Phys. , vol.101 , pp. 033713
- Donga, B.-Z.¹ Fang, G.-J.²

11
- 0036150051
- B. Thangaraju Thin Solid Films 402 2002 71
- (2002) Thin Solid Films , vol.402 , pp. 71
- Thangaraju, B.¹

12
- 0031074747
- C. Terrier, J.P. Chatelon, and J.A. Roger Thin Solid Films 295 1997 95
- (1997) Thin Solid Films , vol.295 , pp. 95
- Terrier, C.¹ Chatelon, J.P.² Roger, J.A.³

13
- 0037154692
- J. Ma, X. Hao, H. Ma, X. Xu, Y. Yang, S. Huang, D. Zhang, and C. Cheng Solid State Commun. 121 2002 345
- (2002) Solid State Commun. , vol.121 , pp. 345
- Ma, J.¹ Hao, X.² Ma, H.³ Xu, X.⁴ Yang, Y.⁵ Huang, S.⁶ Zhang, D.⁷ Cheng, C.⁸

14
- 0031250623
- S.C. Ray, M.K. Karanjai, and D. Dasgupta Thin Solid Films 307 1997 221
- (1997) Thin Solid Films , vol.307 , pp. 221
- Ray, S.C.¹ Karanjai, M.K.² Dasgupta, D.³

15
- 68449089003
- Z. Remes, M. Vanacek, H.M. Yates, P. Evans, and D.W. Sheel Thin Solid Films 517 2009 6287
- (2009) Thin Solid Films , vol.517 , pp. 6287
- Remes, Z.¹ Vanacek, M.² Yates, H.M.³ Evans, P.⁴ Sheel, D.W.⁵

16
- 77953134032
- M. Kwoka, L. Ottaviano, N. Waczynska, S. Santucci, and J. Szuber Appl. Surf. Sci. 256 2010 5771
- (2010) Appl. Surf. Sci. , vol.256 , pp. 5771
- Kwoka, M.¹ Ottaviano, L.² Waczynska, N.³ Santucci, S.⁴ Szuber, J.⁵

17
- 0035507275
- J.J. Robins, R.T. Alexander, M. Bai, and Y.-J. Huang J. Vac. Sci. Technol. A 19 2001 2762
- (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 2762
- Robins, J.J.¹ Alexander, R.T.² Bai, M.³ Huang, Y.-J.⁴

18
- 0031124837
- H. Ma, D. Zhang, Y. Chen, S. Li, J. Ma, and F. Zhong Thin Solid Films 298 1997 151
- (1997) Thin Solid Films , vol.298 , pp. 151
- Ma, H.¹ Zhang, D.² Chen, Y.³ Li, S.⁴ Ma, J.⁵ Zhong, F.⁶

19
- 0032668269
- K. Omura, P. Veluchamy, M. Tsuji, T. Nishio, and M. Murozono J. Electrochem. Soc. 146 1999 2113
- (1999) J. Electrochem. Soc. , vol.146 , pp. 2113
- Omura, K.¹ Veluchamy, P.² Tsuji, M.³ Nishio, T.⁴ Murozono, M.⁵

20
- 0026898564
- J. Proscia, and R. Gordon Thin Solid Films 214 1992 175
- (1992) Thin Solid Films , vol.214 , pp. 175
- Proscia, J.¹ Gordon, R.²

21
- 0033872215
- S.M. Lee, D.L. Kim, H.J. Youn, and K.S. Hong Jpn. J. Appl. Phys. 39 2000 407
- (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 407
- Lee, S.M.¹ Kim, D.L.² Youn, H.J.³ Hong, K.S.⁴

22
- 0026256807
- G. Sanon, R. Rup, and A. Mansingh Phys. Status Solidi A128 1991 109
- (1991) Phys. Status Solidi , vol.128 , pp. 109
- Sanon, G.¹ Rup, R.² Mansingh, A.³

23
- 0001418947
- F.J. Yusta, M.L. Hitchman, and S.H. Shamlian J. Mater. Chem. 7 1997 1421
- (1997) J. Mater. Chem. , vol.7 , pp. 1421
- Yusta, F.J.¹ Hitchman, M.L.² Shamlian, S.H.³

24
- 0026256807
- G. Sanon, R. Rup, and A. Mansingh Phys. Status Solidi A 128 1991 109
- (1991) Phys. Status Solidi A , vol.128 , pp. 109
- Sanon, G.¹ Rup, R.² Mansingh, A.³

25
- 79958230801
- PhD Thesis, Eindhoven University of Technology
- A.M.B. van Mol, PhD Thesis, Eindhoven University of Technology, 2003.
- (2003) A.M.B. Van Mol

26
- 78349305520
- Y. Gotoh, and M. Mizuhashi Reports Res. Lab. Asahi Glass Co., Ltd. 34 1984 123
- (1984) Reports Res. Lab. Asahi Glass Co., Ltd. , vol.34 , pp. 123
- Gotoh, Y.¹ Mizuhashi, M.²

27
- 0038806782
- Y. Matsui, M. Mitsuhashi, and Y. Goto Surf. Coat. Technol. 169-170 2003 549
- (2003) Surf. Coat. Technol. , vol.169-170 , pp. 549
- Matsui, Y.¹ Mitsuhashi, M.² Goto, Y.³

28
- 33846031632
- Y. Matsui, M. Mitsuhashi, Y. Yamamoto, and S. Higashi Thin Solid Films 515 2007 2854
- (2007) Thin Solid Films , vol.515 , pp. 2854
- Matsui, Y.¹ Mitsuhashi, M.² Yamamoto, Y.³ Higashi, S.⁴

29
- 60249102128
- Y. Matsui, and Y. Yamamoto Thin Solid Films 517 2009 2953
- (2009) Thin Solid Films , vol.517 , pp. 2953
- Matsui, Y.¹ Yamamoto, Y.²

30
- 39349104529
- I. Volintiru, M. Creatore, and M.C.M. van de Sanden J. Appl. Phys. 103 2008 033704
- (2008) J. Appl. Phys. , vol.103 , pp. 033704
- Volintiru, I.¹ Creatore, M.² Van De Sanden, M.C.M.³

31
- 0017907179
- R.N. Ghoshtagore J. Electrochem. Soc. 125 1978 110
- (1978) J. Electrochem. Soc. , vol.125 , pp. 110
- Ghoshtagore, R.N.¹

32
- 0024701873
- C. Agashe, M.G. Takwale, B.R. Marathe, and V.G. Bhide J. Mater. Sci. 24 1989 2628
- (1989) J. Mater. Sci. , vol.24 , pp. 2628
- Agashe, C.¹ Takwale, M.G.² Marathe, B.R.³ Bhide, V.G.⁴

33
- 0001138580
- J. Hu, and R.G. Gordon J. Appl. Phys. 72 1992 5381
- (1992) J. Appl. Phys. , vol.72 , pp. 5381
- Hu, J.¹ Gordon, R.G.²

34
- 0028442707
- J. Bruneaux, H. Cachet, M. Froment, and A. Messad Electrochim. Acta 39 1994 1251
- (1994) Electrochim. Acta , vol.39 , pp. 1251
- Bruneaux, J.¹ Cachet, H.² Froment, M.³ Messad, A.⁴

35
- 49149091965
- A.K. Singh, A. Janotti, M. Scheffler, and C.G. van de Walle Phys. Rev. Lett. 101 2008 055502
- (2008) Phys. Rev. Lett. , vol.101 , pp. 055502
- Singh, A.K.¹ Janotti, A.² Scheffler, M.³ Van De Walle, C.G.⁴

36
- 33344468320
- R.Y. Korotkov, P. Ricou, and A.J.E. Farran Thin Solid Films 502 2006 79
- (2006) Thin Solid Films , vol.502 , pp. 79
- Korotkov, R.Y.¹ Ricou, P.² Farran, A.J.E.³

37
- 11444262574
- R. Groenen, M. Creatore, and M.C.M. van de Sanden Appl. Surf. Sci. 241 2005 321
- (2005) Appl. Surf. Sci. , vol.241 , pp. 321
- Groenen, R.¹ Creatore, M.² Van De Sanden, M.C.M.³

38
- 34548460233
- I. Volintiru, M. Creatore, B.J. Kniknie, C.I.M.A. Spee, and M.C.M. van de Sanden J. Appl. Phys. 102 2007 043709
- (2007) J. Appl. Phys. , vol.102 , pp. 043709
- Volintiru, I.¹ Creatore, M.² Kniknie, B.J.³ Spee, C.I.M.A.⁴ Van De Sanden, M.C.M.⁵

39
- 42649089136
- K. Ellmer, and R. Mientus Thin Solid Films 516 2008 4620
- (2008) Thin Solid Films , vol.516 , pp. 4620
- Ellmer, K.¹ Mientus, R.²

40
- 0000431042
- A.E. Rakhshani, Y. Makdisi, and H.A. Ramazaniyan J. Appl. Phys. 83 1998 1049
- (1998) J. Appl. Phys. , vol.83 , pp. 1049
- Rakhshani, A.E.¹ Makdisi, Y.² Ramazaniyan, H.A.³

41
- 79952555973
- A. Yanguas-Gil, and J. Elam ECS Trans. 33 2010 333
- (2010) ECS Trans. , vol.33 , pp. 333
- Yanguas-Gil, A.¹ Elam, J.²

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