Atmospheric pressure PECVD of fluorocarbon coatings from glow dielectric barrier discharges

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Fanelli, Fiorenza ^a   Fracassi, Francesco ^a   d'Agostino, Riccardo ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

Atmospheric pressure glow discharges (APGD); Coatings; Deposition; Films; Fluorocarbon films; Glow dielectric barrierdischarges (GDBD)

Indexed keywords

ATMOSPHERIC PRESSURE GLOW DISCHARGES (APGD); CROSS-LINKING DEGREE; F/C RATIO; FILM CHARACTERISTICS; FLUOROCARBON COATINGS; FLUOROCARBON FILMS; GLOW DIELECTRIC BARRIER DISCHARGE; GLOW DIELECTRIC BARRIERDISCHARGES (GDBD); HEXAFLUOROPROPENE; SPECTROSCOPIC INVESTIGATIONS;

ATMOSPHERIC PRESSURE; COATINGS; DEPOSITION RATES; DIELECTRIC MATERIALS; GLOW DISCHARGES; HELIUM; HYDROGEN; PLASMAS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 36348961996     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200731201     Document Type: Conference Paper

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