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Volumn 44, Issue 42, 2011, Pages

The 2D plasma potential distribution in a HiPIMS discharge

Author keywords

[No Author keywords available]

Indexed keywords

ARGON GAS; AVERAGE POWER; CONFINED PLASMAS; DISCHARGE CURRENTS; ELECTRON DRIFT VELOCITY; EMISSIVE PROBE; GROUND POTENTIAL; HIGH-POWER; MAGNETRON OPERATIONS; NEGATIVE VALUES; PLASMA POTENTIAL; PULSE FREQUENCIES; PULSED DC; RADIAL ELECTRIC FIELD; SPATIAL-TEMPORAL DISTRIBUTION; TITANIUM TARGETS; VOLTAGE PULSE;

EID: 80055081347     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/42/425201     Document Type: Article
Times cited : (51)

References (41)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.