Short- and long-term plasma phenomena in a HiPIMS discharge

Plasma Sources Science and Technology

Volumn 19, Issue 2, 2010, Pages

  Poolcharuansin, P ^a   Bradley, J W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BULK PLASMA; DECAY RATE; DECAY TIME; DISCHARGE CONDITIONS; EFFECTIVE TEMPERATURE; ELECTRON DENSITIES; ELECTRON GROUPS; ENERGY DISTRIBUTION FUNCTIONS; FLOATING POTENTIALS; HIGH DENSITY; HIGH-POWER; NEGATIVE VALUES; PLASMA PHENOMENA; PLASMA POTENTIAL; PULSE ON-TIME; PULSE PERIOD; PULSE WIDTH; REPETITION RATE; TARGET POWER DENSITY; TEMPORAL EVOLUTION; TEMPORAL RESOLUTION; THERMAL ELECTRON; TIME EVOLUTIONS; TIME-RESOLVED; TITANIUM TARGETS; TYPICAL VALUES; VOLTAGE PULSE;

ARGON; CARRIER CONCENTRATION; DECAY (ORGANIC); DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; HOT ELECTRONS; MAGNETRONS; PLASMA DENSITY; PROBES; PULSE REPETITION RATE; THERMIONIC EMISSION; TITANIUM;

ELECTRON TEMPERATURE;

EID: 77950278727     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/2/025010     Document Type: Article

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