The current-density distribution in a pulsed dc magnetron deposition discharge

Journal of Physics D: Applied Physics

Volumn 40, Issue 7, 2007, Pages 2037-2044

  Vetushka, Alena ^a   Bradley, James W ^b  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DEPOSITION; ELECTRON TRANSPORT PROPERTIES; MAGNETIC FIELDS; MAGNETRONS; PLASMA DENSITY;

CURVATURE DRIFTS; MAGNETRON DEPOSITION DISCHARGES; PLASMA IONS; PULSED MAGNETRONS;

ELECTRIC DISCHARGES;

EID: 33947415412     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/7/028     Document Type: Article

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