On the electron energy in the high power impulse magnetron sputtering discharge

Journal of Applied Physics

Volumn 105, Issue 12, 2009, Pages

  Gudmundsson, J T ^a   Sigurjonsson, P ^a   Larsson, P ^b   Lundin, D ^b   Helmersson, U ^b  

^a UNIVERSITY OF ICELAND   (Iceland)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE PRESSURES; ELECTRON ENERGIES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; HIGH-ELECTRON-DENSITY; HIGH-POWER; HIGH-POWER PULSE; HIGHLY-IONIZED; METAL CONTENT; PLANAR MAGNETRON; TEMPORAL VARIATION;

DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRONS;

MAGNETRONS;

EID: 67650227428     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3151953     Document Type: Conference Paper

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