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Volumn 20, Issue 4, 2011, Pages

Internal current measurements in high power impulse magnetron sputtering

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL DIRECTION; AZIMUTHAL DIRECTION; BULK PLASMA; CURRENT MEASUREMENTS; CURRENT SYSTEM; CURRENT TRANSPORT; DEPOSITION TECHNIQUE; ELECTRON TRANSPORT; GRADUAL CHANGES; HIGH-POWER; ION ACCELERATIONS; MAGNETIC FIELD LINE; MAGNETRON DISCHARGES; PHENOMENOLOGICAL MODELS; PLASMA DYNAMICS; PULSED DC; PULSED PLASMA; ROGOWSKI COIL; SPATIAL AND TEMPORAL VARIATION; SPUTTERED MATERIALS; STEADY STATE; TEMPORALLY RESOLVED; TRANSPORT MECHANISM; TRANSPORT PARAMETERS;

EID: 80051613409     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/4/045003     Document Type: Article
Times cited : (36)

References (20)
  • 20
    • 80051628780 scopus 로고    scopus 로고
    • Sigurjonsson P 2008 Spatial and temporal variation of the plasma parameters in a high power impulse magnetron sputtering (HiPIMS) discharge Thesis Faculty of Engineering, University of Iceland, Reykjavik
    • (2008) Thesis
    • Sigurjonsson, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.