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Volumn 20, Issue 4, 2011, Pages
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Internal current measurements in high power impulse magnetron sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
AXIAL DIRECTION;
AZIMUTHAL DIRECTION;
BULK PLASMA;
CURRENT MEASUREMENTS;
CURRENT SYSTEM;
CURRENT TRANSPORT;
DEPOSITION TECHNIQUE;
ELECTRON TRANSPORT;
GRADUAL CHANGES;
HIGH-POWER;
ION ACCELERATIONS;
MAGNETIC FIELD LINE;
MAGNETRON DISCHARGES;
PHENOMENOLOGICAL MODELS;
PLASMA DYNAMICS;
PULSED DC;
PULSED PLASMA;
ROGOWSKI COIL;
SPATIAL AND TEMPORAL VARIATION;
SPUTTERED MATERIALS;
STEADY STATE;
TEMPORALLY RESOLVED;
TRANSPORT MECHANISM;
TRANSPORT PARAMETERS;
CHARGED PARTICLES;
DC POWER TRANSMISSION;
DYNAMICS;
ELECTRIC FIELDS;
MAGNETIC FIELDS;
PLASMA DIAGNOSTICS;
PLASMAS;
ELECTRIC DISCHARGES;
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EID: 80051613409
PISSN: 09630252
EISSN: 13616595
Source Type: Journal
DOI: 10.1088/0963-0252/20/4/045003 Document Type: Article |
Times cited : (36)
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References (20)
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