Time- and species-resolved plasma imaging as a new diagnostic approach for hipims discharge characterization

IEEE Transactions on Plasma Science

Volumn 38, Issue 11 PART 1, 2010, Pages 3035-3039

  Hala, Matéj ^a   Zabeida, Oleg ^a   Baloukas, Bill ^a   Klemberg Sapieha, Jolanta E ^a   Martinu, Ludvik ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Magnetron sputtering; optical emission spectroscopy; optical filters; pulsed plasmas; thin film deposition

Indexed keywords

BACKGROUND GAS; BAND PASS; CHROMIUM EMISSIONS; DIAGNOSTIC APPROACH; EMISSION LINES; FAST IMAGING; HIGH-POWER; OPTICAL EMISSIONS; OPTICAL INTERFERENCE; PLASMA EFFECTS; PLASMA IMAGING; PULSED PLASMA; THIN-FILM DEPOSITIONS; TIME-RESOLVED ANALYSIS; WORKING GAS;

ARGON; BANDPASS FILTERS; CHROMIUM; ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; GAS EMISSIONS; LIGHT EMISSION; MAGNETRON SPUTTERING; OPTICAL FILTERS; PLASMAS;

OPTICAL EMISSION SPECTROSCOPY;

EID: 78349304724     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2010.2064183     Document Type: Conference Paper

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