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Volumn 10, Issue 3, 2001, Pages 490-501
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Measurement of the plasma potential in a magnetron discharge and the prediction of the electron drift speeds
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER CONCENTRATION;
ELECTRIC DISCHARGES;
ELECTRIC FIELD EFFECTS;
MAGNETRONS;
MATHEMATICAL MODELS;
PLASMA POTENTIALS;
PLASMAS;
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EID: 0035418525
PISSN: 09630252
EISSN: None
Source Type: Journal
DOI: 10.1088/0963-0252/10/3/314 Document Type: Article |
Times cited : (146)
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References (39)
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