The evolution of the plasma potential in a HiPIMS discharge and its relationship to deposition rate

Plasma Sources Science and Technology

Volumn 19, Issue 4, 2010, Pages

  Mishra, Anurag ^a   Kelly, P J ^b   Bradley, J W ^a  

^a UNIVERSITY OF LIVERPOOL   (United Kingdom)

^b MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE POWER; DISCHARGE VOLTAGE WAVEFORM; DYNAMIC NATURE; GROUND POTENTIAL; HIGH-POWER; IONIZED SPECIES; MAGNETIC FIELD STRENGTHS; MAGNETIC TRAP; NEGATIVE V; OPEN FIELD LINES; PLASMA POTENTIAL; POTENTIAL BARRIERS; POTENTIAL GRADIENTS; PULSED DC MAGNETRON; SMALL REDUCTION; SPATIAL STRUCTURE; STANDARD CONDITIONS; TEMPORAL EVOLUTION; TEMPORAL VARIATION; TIME-RESOLUTION;

DC POWER TRANSMISSION; DEPOSITION RATES; ELECTRIC FIELDS; MAGNETIC FIELDS; MAGNETIC MATERIALS; PLASMA CONFINEMENT; PLASMA DEPOSITION; PROBES;

ELECTRIC DISCHARGES;

EID: 77953760447     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/19/4/045014     Document Type: Article

References (39)

1. Berg S and Nyberg T 2005 Thin Solid Films 476 215
2. Kouznetsov V, Macak K, Schneider J M, Helmersson U and Petrov I 1999 Surf. Coat. Technol. 122 290
3. Ehiasarian A P, New R, Munz W-D, Hultman L, Helmersson U and Kouznetsov V 2002 Vacuum 65 147
4. Helmersson U, Latterman M, Bohlmark J, Ehiasarian A P and Gudmundsson J T 2006 Thin Solid Films 513 1
5. Ehiasarian A P, Wen J G and Petrov I 2007 J. Appl. Phys. 101 054301
6. Ehiasarian A P, Munz W-D, Hultman L, Helmersson U and Petrov I 2003 Surf. Coat. Technol. 163-164 267
7. Christie D J 2005 J. Vac. Sci. Technol. A 23 330
8. Helmersson U, Lattemann M, Alami J, Bohlmark J, Ehiasarian A P and Gudmundsson J T 2005 48th Annual Technical Conf. of Society of Vacuum Coaters (Denver, CO, 2005) p 458
9. Emmerlich J, Mraz S, Snyders R, Jiang K and Schneider M 2008 Vacuum 82 867
10. Bohlmark J, Ostbye M, Lattemann M, Ljungcrantz H, Rosell T and Helmersson U 2006 Thin Solid Films 515 1928
11. Lundin D, Larsson P, Wallin E, Lattermann M, Brenning N and Helmersson U 2008 Plasma Sources Sci. Technol. 17 035021
12. Konstantinidis S and Dauchot J P 2006 Appl. Phys. Lett. 88 021501
13. Bradley J W, Karkari S K and Vetushka A 2004 Plasma Sources Sci. Technol. 13 189
14. Bradley J W, Thompson S and Gonzalvo Y A 2001 Plasma Sources Sci. Technol. 10 490
15. Vetushka A, Karkari S and Bradley J W 2004 J. Vac. Sci. Technol. A 22 2459
16. Gudmundsson J T, Alami J and Helmersson U 2002 Surf. Coat. Technol. 161 249
17. Gudmundsson J T, Alami J and Helmersson U 2001 Appl. Phys. Lett. 78 3427
18. Pajdarova A D, Vlcek J, Kudlacek and Lukas J 2009 Plasma Sources Sci. Technol. 18 025008
19. Welzel Th, Dunger Th, Leibig L and Richter F 2008 New J. Phys. 10 123008
20. Karkari S K, Vetushka A and Bradley J W 2003 J. Vac. Sci. Technol. A 21 L28
21. Balan P et al 2003 Rev. Sci. Instrum. 74 1583
22. Chen F F 1965 Plasma Diagnostics Techniques ed R H Huddlestone and S L Leonard (New York: Academic) chapter 4
23. Kemp R F and Sellen J M 1966 Rev. Sci. Instrum. 37 455
24. Wang E Y, Hershkowitz N, Intrator T and Forest C 1986 Rev. Sci. Instrum. 57 2425
25. Smith J R, Hershkowitz N and Coakley P 1979 Rev. Sci. Instrum. 50 210
26. Phistanu P and Bradley J W 2010 Plasma Sources Sci. Technol. 19 025010
27. Allen J E 1985 Plasma Phys. Control. Fusion A 27 1343
28. Brenning N, Axnas I, Raadu M A, Lundin D and Helmerson U 2008 Plasma Sources Sci. Technol. 17 045009
29. Bohlmark J, Lattemann M, Gudmundsson J T, Ehiasarian A P, Aranda-Gonzalvo Y, Brenning N and Helmersson U 2006 Thin Solid Films 515 1522
30. Mishra A, Clarke G, Kelly P and Bradley J 2009 Plasma Process. Polym. 6 S610
31. Hecimovic A and Ehiasarian A P 2009 J. Phys. D: Appl. Phys. 42 135209
32. Bradley J W and Welzel T 2009 J. Phys. D: Appl. Phys. 42 093001
33. van der Straaten T A, Cramer N F, Falconer I S and James B W 1998 J. Phys. D: Appl. Phys. 31 177
34. Lundin D, Helmersson U, Kirkpatrick S, Rohde S and Brenning N 2008 Plasma Sources Sci. Technol. 17 025007
35. Vetushka A and Bradley J W 2007 J. Phys. D: Appl. Phys. 40 2037
36. Bohlmark J, Helmersson U, VanZeeland M, Axnas I, Alami J and Brenning N 2004 Plasma Sources Sci. Technol. 13 654
37. Sigmund P 1969 Phys. Rev. 184 383
38. van der Straaten T A, Cramer N F, Falconer I S and James B W 1998 J. Phys. D: Appl. Phys. 31 191
39. Chapman B 1980 Glow Discharge Processes (New York: Wiley) p 376 appendix