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Volumn 257, Issue 9, 2011, Pages 4082-4090

Optimisation of the ammonium sulphide (NH 4 ) 2 S passivation process on In 0.53 Ga 0.47 As

Author keywords

Ammonium sulphide; Chemical passivation; InGaAs; Native oxide; Photoemission; Sulphur passivation; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; GALLIUM COMPOUNDS; III-V SEMICONDUCTORS; INTERFACE STATES; INTERFACES (MATERIALS); PASSIVATION; PHOTOEMISSION; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTOR DEVICES; SULFUR COMPOUNDS; SURFACE ROUGHNESS;

EID: 78951478805     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.11.179     Document Type: Article
Times cited : (79)

References (75)
  • 2
    • 78951488210 scopus 로고    scopus 로고
    • http://www.itrs.net/Links/2009ITRS/2009Chapters-2009Tables/2009-ExecSum. pdf, p. 17.
  • 63
    • 0001357488 scopus 로고    scopus 로고
    • AANALYZER is software for XPS peak deconvolution and available from: http://qro.cinvestav.mx/∼aanalyzer
    • A. Herrera-Gómez, P. Pianetta, D. Marshall, E. Nelson, W.E. Spicer, Phys. Rev. B 61 (2000) 12988. AANALYZER is software for XPS peak deconvolution and available from: http://qro.cinvestav.mx/∼aanalyzer/.
    • (2000) Phys. Rev. B , vol.61 , pp. 12988
    • Herrera-Gómez, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.