Energy loss in XPS: Fundamental processes and applications for quantification, non-destructive depth profiling and 3D imaging

Journal of Electron Spectroscopy and Related Phenomena

Volumn 178-179, Issue C, 2010, Pages 128-153

  Tougaard, Sven ^a  

^a UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

3D imaging; Energy loss; Nano scale quantification; Non destructive depth profiling; XPS

Indexed keywords

3D IMAGING; ENERGY LOSS; NANO SCALE; NON DESTRUCTIVE; NON-DESTRUCTIVE DEPTH PROFILING; XPS;

ELECTRIC FIELDS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONS; ENERGY DISSIPATION; IMAGING SYSTEMS; NANOSTRUCTURED MATERIALS; THREE DIMENSIONAL; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILING;

EID: 77951023330     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2009.08.005     Document Type: Review

References (146)

1. In: Briggs D., and Grant J.T. (Eds). Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (2003), IM-Publications ISBN 1 901019047
2. In: J.C. Rivière, S. Myhra (Eds.), Handbook of Surface and Interface Analysis: Methods for Problem-solving, 2nd edition, Taylor and Francis CRC Press (2009). ISBN 13:978-0-8493-7558-3.
3. Tanuma S., Powell C.J., and Penn D.R. Surf. Interface Anal. 17 (1991) 911
4. Tanuma S., Powell C.J., and Penn D.R. Surf. Interface Anal. 21 (1993) 165
5. Tanuma S., Powell C.J., and Penn D.R. Surf. Interface Anal. 21 (1994) 165
6. Powell C.J., and Jablonski A. NIST Electron Inelastic-Mean-Free-path Database, SRD, 71, Version 1.1 (2000), National Institute of Standards and Technology, Gaithersburg, MD
7. Ritchie R.H. Phys. Rev. 106 (1957) 874
8. Yubero F., and Tougaard S. Phys. Rev. B 46 (1992) 2486
9. Simonsen A.C., Yubero F., and Tougaard S. Phys. Rev. B 56 (1997) 1612
10. Gergerly G., Menyhard M., Gurban S., Sulyok A., Toth J., Varga D., and Tougaard S. Surf. Interface Anal. 33 (2002) 410-413
11. Werner W.S.M., Smekal W., Störi H., and Eisenmenger-Sittner C.E. J. Vac. Sci. Technol. A 19 (2001) 2388
12. Pauly N., Tougaard S., and Yubero F. Surf. Interface Anal. 37 (2005) 1151
13. Pauly N., and Tougaard S. Surf. Sci. 602 (2008) 1974
14. Salma K., Ding Z.J., Li H.M., and Zhang Z.M. Surf. Sci. 600 (2006) 1526
15. Zemek J., Jiricek P., Lesiak B., and Jablonski A. Surf. Sci. 562 (2004) 92
16. Pauly N., and Tougaard S. Surf. Interface Anal. 41 (2009) 23
17. Tougaard S. J. Vac. Sci. Technol. A14 (1996) 1415
18. Tougaard S., and Sigmund P. Phys. Rev. B25 (1982) 4452
19. Tougaard S., and Ignatiev A. Surf. Sci. 129 (1983) 355
20. Tougaard S. Surf. Sci. 162 (1985) 875
21. Tougaard S. Surf. Interface Anal. 11 (1988) 453
22. Tougaard S., and Hansen H.S. Surf. Interface Anal. 14 (1989) 730
23. Tougaard S. Surf. Interface Anal. 26 (1998) 249
24. Citrin P.H., Wertheim G.K., and Baer Y. Phys. Rev. B 16 (1977) 4256
25. Steiner P., Höchst H., and Hüfner S. Z. Phys. B 30 (1978) 129
26. Penn D.R. Phys. Rev. Lett. 38 (1977) 1429
27. Tougaard S. Phys. Rev. B34 (1986) 6779
28. Werner W.S.M. Surf. Sci. 526 (2003) L159
29. Berglund C.N., and Spicer W.E. Phys. Rev. 136 (1964) A1030
30. Lundqvist B.I. Phys. Kondens. Mater. 9 (1969) 236
31. Doniach S., and Sunjic M. J. Phys. C. Solid State 3 (1970) 285
32. Gersten J.L., and Tzoar N. Phys. Rev. B 8 (1973) 5671
33. Chang J.J., and Langreth D.C. Phys. Rev. B 8 (1973) 4638
34. Feibelman P.J. Phys. Rev. B 7 (1973) 2305
35. Mahan G.D. Phys. Rev. B 11 (1975) 4814
36. Pardee J., Mahan G.D., Eastman D.E., and Pollak R.A. Phys. Rev. B 11 (1975) 3614
37. Inglesfield J.E. Solid State Commun. 40 (1981) 467
38. Hedin L., Michaels J., and Inglesfield J. Phys. Rev. B 58 (1998) 15565
39. Hedin L., and Lee J.D. J. Electron Spectrosc. Relat. Phenom. 124 (2002) 289
40. Werner W.S.M. Surf. Interface Anal. 31 (2001) 141
41. Fujikawa T., and Arai H. Chem. Phys. Lett. 368 (2003) 147
42. Yubero F., and Tougaard S. Phys. Rev. B 71 (2005) 045414
43. Yubero F., Kover L., Drube W., Eickhoff Th., and Tougaard S. Surf. Sci. 592 (2005) 1
44. Berényi Z., Kövér L., Tougaard S., Yubero F., Tóth J., Cserny I., and Varga D. J. Electron Spectrosc. Relat. Phenom. 135 (2004) 177-182
45. Kövér L., Novák M., Egri S., Cserny I., Berényi Z., Tóth J., Varga D., Drube W., Yubero F., Tougaard S., and Werner W.S.M. Surf. Interface Anal. 38 (2006) 569
46. Yubero F., Sanz J.M., Ramskov B., and Tougaard S. Phys. Rev. B 53 (1996) 9719
47. Yubero F., Fujita D., Ramskov B., and Tougaard S. Phys. Rev. B 53 (1996) 9728
48. Hajati S., Romanyuk O., Zemek J., and Tougaard S. Phys. Rev. B 77 (2008) 155403
49. Hajati S., Romanyuk O., Zemek J., and Tougaard S. Phys. Rev. B 77 (2008) 249904
50. S. Tougaard, F. Yubero, QUEELS-XPS: Software to Calculate Intrinsic, Extrinsic and Surface Effects in XPS Ver. 1 (2009) http://www.quases.com.
51. Lindhard J., and Dan K. Vindesk. Selsk. Mat. Fys. Medd. 28 (1954) 8
52. Tougaard S., and Chorkendorff I. Phys. Rev. B35 (1987) 6570
53. Tougaard S., and Kraaer J. Phys. Rev. B43 (1991) 1651
54. Tougaard S. Solid State Commun. 61 (1987) 547
55. Tougaard S. Surf. Interface Anal. 25 (1997) 137
56. Tougaard S. J. Electron Spectrosc. Relat. Phenom. 52 (1990) 243
57. Tougaard S. J. Vac. Sci. Technol. A8 (1990) 2197
58. Werner W.S.M., Smekal W., and Powell C.J. NIST Database for the Simulation of Electron Spectra for Surface Analysis, SRD, 100, Version 1.0 (2005), National Institute of Standards and Technology, Gaithersburg
59. S. Tougaard, QUASES: Software for Quantitative XPS/AES of Surface Nanostructures by Analysis of the Peak-shape and the Background, Ver. 5.1 (1994-2008). http://www.quases.com.
60. Tougaard S. J. Vac. Sci. Technol. A21 (2003) 1081
61. Tougaard S. J. Vac. Sci. Technol. A23 (2005) 741
62. Hajati S., Coultas S., Blomfield C., and Tougaard S. Surf. Sci. 600 (2006) 3015
63. Hajati S., Coultas S., Blomfield C., and Tougaard S. Surf. Interface Anal. 40 (2008) 688
64. Hajati S., Tougaard S., Walton J., and Fairley N. Surf. Sci. 602 (2008) 3064
65. Ritchie R.H., and Howie A. Philos. Mag. 36 (1977) 463
66. Yubero F., Tougaard S., Elizalde E., and Sanz J.M. Surf. Interface Anal. 20 (1993) 719
67. Yubero F., Sanz J.M., Trigo J.F., Elizalde E., and Tougaard S. Surf. Interface Anal. 22 (1994) 124
68. Tougaard S., and Yubero F. Surf. Interface Anal. 36 (2004) 824
69. Ritchie H., and Marusak A.L. Surf. Sci. 4 (1966) 234
70. Gervasoni J.L., and Arista N.R. Surf. Sci. 260 (1992) 329
71. Biswas C., Shukla A.K., Banik S., Ahire V.K., and Barman S.R. Phys. Rev. B 67 (2003) 165416
72. Handbook of Optical Constants of Solids (1985), Edward Palik Academic Press, New York
73. S. Tougaard, F. Yubero, QUEELS-∈(k,ω)-REELS: Software to Determine the Dielectric Function from Experimental REELS, Ver. 3.0 (2003-2007), http://www.quases.com.
74. Landau L. J. Phys. (Moscow) 8 (1944) 201
75. Oran Brigham E. The Fast Fourier Transform (1974), Prentice-Hall, Englewood Cliffs, NJ
76. S. Tougaard, QUEELS-XS-REELS: Software for Determination of the Inelastic-scattering Cross-section by Analysis of REELS Ver. 2.1 (2003), http://www.quases.com.
77. Werner W.S.M. Surf. Sci. 588 (2005) 26
78. Nagatomi T., and Goto K. Appl. Phys. Lett. 87 (2005) Art. No 224107
79. Seah M.P. Surf. Sci. 420 (1999) 285
80. Hansen H.S., and Tougaard S. Surf. Interface Anal. 17 (1991) 593
81. Bischel H., and Saxon R.P. Phys. Rev. A11 (1975) 1286
82. Tougaard S. Surf. Sci. 139 (1984) 208
83. Tougaard S. Appl. Surf. Sci. 101 (1996) 1
84. Martin-Concepción A.I., Yubero F., Espinós J.P., González-Elipe A.R., and Tougaard S. J. Vac. Sci. Technol. A21 (2003) 1393
85. Tougaard S., Braun W., Holub-Krappe E., and Saalfeld H. Surf. Interface Anal. 13 (1988) 225
86. Seah M.P. Surf. Interface Anal. 20 (1993) 243
87. Scofield J.H. J. Electron Spectrosc. 8 (1976) 129
88. Reilman R.F., Msezane A., and Manson S.T. J. Electron Spectrosc. 8 (1976) 389
89. Seah M.P., Gilmore I.S., and Spencer S.J. Surf. Interface Anal. 31 (2001) 778
90. Band I.M., Kharitonov Y.I., and Trzhaskovskaya M.B. Atom. Data Nucl. Data Tables 23 (1979) 443
91. Jablonski A., and Tougaard S. Surf. Interface Anal. 26 (1998) 17
92. Jablonski A., and Tougaard S. Surf. Interface Anal. 26 (1998) 374
93. Jablonski A., and Tougaard S. Surf. Interface Anal. 22 (1994) 129
94. Tougaard S., and Jablonski A. Surf. Interface Anal. 25 (1997) 404
95. Jablonski A., and Tougaard S. J. Vac. Sci. Technol. A8 (1990) 106
96. Powell C.J., and Jablonski A. SIA 33 (2002) 211
97. Egerton R.F. Electron Energy-loss Spectroscopy in the Electron Microscope. 2nd edition (1996), Plenum Press, New York p. 174
98. Orosz G.T., Gergely G., Gurban S., Menyhard M., Toth J., Varga D., and Tougaard S. Vacuum 71 (2003) 147
99. Kwei C.M., Tu Y.H., and Tung C.J. Nucl. Instr. Method B 230 (2005) 125
100. Tu Y.H., Kwei C.M., and Tung C.J. Surf. Sci. 601 (2007) 865
101. Pauly N., and Tougaard S. Surf. Sci. 601 (2007) 5611
102. Pauly N., Tougaard S., and Yubero F. Surf. Interface Anal. 38 (2006) 672
103. Hansen H.S., Bensauola A., Tougaard S., Zborowski J., and Ignatiev A. J. Cryst. Growth 116 (1992) 271
104. Simonsen A.C., Schleberger M., Tougaard S., Hansen J.L., and Nylandsted Larsen A. Thin Solid Films 338 (1999) 165
105. Eon D., Cartry G., Fernandez V., Cardinaud C., Tegou E., Bellas V., Argitis P., and Gogolides E. J. Vac. Sci. Technol. B22 (2004) 2526
106. Jussila P., Lahtonen K., Lampimäki M., Hirisimäki M., and Valden M. Surf. Interface Anal. 40 (2008) 1149
107. Payne B.P., Grosvenor A.P., Biesinger M.C., Kobe B.A., and McIntyre N.S. Surf. Interface Anal. 39 (2007) 582-592
108. Grosvenor A.P., Kobe B.A., McIntyre N.S., Tougaard S., and Lennard W.N. Surf. Interface Anal. 36 (2004) 632
109. Hansen H.S., Tougaard S., and Biebuyck H. J. Electron Spectrosc. Relat. Phenom. 58 (1992) 141
110. Lampimäki M., Lahtonen K., Hirisimäki M., and Valden M. Surf. Interface Anal. 39 (2007) 359
111. Hanley L., Choi Y., Fuoco E.R., et al. Nucl. Instr. Method Phys. Res. B203 (2003) 1116
112. Tougaard S., Hansen H.S., and Neumann M. Surf. Sci. 244 (1991) 125
113. Schleberger M., Fujita D., Scharfschwerdt C., and Tougaard S. Surf. Sci. 331-333 (1995) 942
114. Fujita D., Schleberger M., and Tougaard S. Surf. Sci. 331-333 (1995) 343
115. Schleberger M., Fujita D., Scharfschwerdt C., and Tougaard S. J. Vac. Sci. Technol. B 13 (1995) 949
116. Kövér L., Tougaard S., Tóth J., Daróczi L., Szabó I., Langer G., and Menyhárd M. Surf. Interface Anal. 31 (2001) 271
117. Andersen T.H., Tougaard S., Larsen N.B., Amdal K., and Johannsen I. J. Electron Spectrosc. 121 (2001) 93
118. Semak B.S., Jensen T., Tækker L.B., Morgen P., and Tougaard S. Surf. Sci. 498 (2002) 11
119. Winters H.F., Graves D.B., Humbird D., and Tougaard S. J. Vac. Sci. Technol. A25 (2007) 96
120. Hajati S., Zaporojtchenko V., Faupel F., and Tougaard S. Surf. Sci. 601 (2007) 3261
121. Fuoco E.R., and Hanley L. J. Appl. Phys. 92 (2002) 37
122. Espinós J.P., Martin-Concepción A.I., Mansilla C., Yubero F., and González-Elipe A.R. J. Vac. Sci. Technol. A24 (2006) 919
123. Zhou M., Wu C., Edirisinghe P.D., Drummond J.L., and Hanley L. J. Biomed. Mater. Res. 77A (2006) 1
124. Johanson E., and Nyborg L. Surf. Interface Anal. 35 (2003) 375
125. Zemek J., Jiricek P., Jablonski A., and Lesiak B. Appl. Surf. Sci. 199 (2002) 138
126. Garcia F., Yubero F., Espinós J.P., and González-Elipe A.R. Appl. Surf. Sci. 252 (2005) 189
127. Del Re M., Gouttebaron R., Dauchot J.P., Leclère P., Lazzaroni R., Wautelet M., and Hecq M. Surf. Coat. Technol. 151-152 (2002) 86
128. Lahtonen K., Lampimäki M., Jussila P., Hirisimäki M., and Valden M. Rev. Sci. Instrum. 77 (2006) 083901
129. Yubero F., González-Elipe A.R., and Tougaard S. Surf. Sci. 457 (2000) 24
130. Gallardo-Vega C., De La Cruz W., Tougaard S., et al. Appl. Surf. Sci. 255 (2008) 3000
131. Tougaard S., Hetterich W., Nielsen A.H., and Hansen H.S. Vacuum 41 (1990) 1583
132. Aronniemi M., Sainio J., and Lahtinen J. Surf. Sci. 578 (2005) 108
133. Cumpson P.J. In: Briggs D., and Grant J.T. (Eds). Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (2003), SIM-Publications, Chichester, West Sussex, UK 651 Chap. 23 (and references therein)
134. Oswald S., and Oswald F. Surf. Interface Anal. 40 (2008) 700
135. Kappen P., Reihs K., Seidel C., Voertz M., and Fuchs H. Surf. Sci. 465 (2000) 40
136. Martin-Concepción A.I., Yubero F., Espinos J.P., Garcia J., and Tougaard S. Surf. Interface Anal. 35 (2003) 984
137. Hansen H.S., Jansson C., and Tougaard S. J. Vac. Sci. Technol. A10 (1992) 2938
138. Cohen Simonsen A., Pøhler J.P., Jeynes C., and Tougaard S. Surf. Interface Anal. 27 (1999) 52
139. Semak B.S., van der Marel C., and Tougaard S. Surf. Interface Anal. 33 (2002) 238
140. van der Marel C., Verheijen M.A., Tamminga Y., Pijnenburg R.H.W., Tombros N., and Cubaynes F. J. Vac. Sci. Technol. A22 (2004) 1572
141. Tougaard S. J. Vac. Sci. Technol. A5 (1987) 1230
142. S. Tougaard, Private communication.
143. Artyushkova K., and Fulghum J.E. J. Electron Spectrosc. Relat. Phenom. 149 (2005) 51
144. Walton J., and Fairley N. J. Electron Spectrosc. Relat. Phenom. 148 (2005) 29
145. Tougaard S. J. Vac. Sci. Technol. A 5 (1987) 1275
146. Savitzky A., and Golay M.J.E. Anal. Chem. 36 (1964) 1627