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Volumn 151-152, Issue , 2002, Pages 86-90

Growth and morphology of magnetron sputter deposited silver films

Author keywords

Atomic force microscopy; ESCA; Magnetron sputtering; QUASESTM; Silver films

Indexed keywords

ARGON; CHEMICAL ANALYSIS; DATA REDUCTION; ELECTRON SPECTROSCOPY; FILM GROWTH; MAGNETRON SPUTTERING; PRESSURE EFFECTS; SILVER; SPUTTER DEPOSITION; SURFACE ROUGHNESS; SURFACE STRUCTURE; THERMAL EFFECTS;

EID: 0036495648     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01592-4     Document Type: Article
Times cited : (29)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.