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Volumn 151-152, Issue , 2002, Pages 86-90
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Growth and morphology of magnetron sputter deposited silver films
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Author keywords
Atomic force microscopy; ESCA; Magnetron sputtering; QUASESTM; Silver films
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Indexed keywords
ARGON;
CHEMICAL ANALYSIS;
DATA REDUCTION;
ELECTRON SPECTROSCOPY;
FILM GROWTH;
MAGNETRON SPUTTERING;
PRESSURE EFFECTS;
SILVER;
SPUTTER DEPOSITION;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
THERMAL EFFECTS;
FILM CLUSTERS;
THIN FILMS;
METALLIC COATING;
SILVER;
SPUTTERING;
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EID: 0036495648
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01592-4 Document Type: Article |
Times cited : (29)
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References (8)
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