Nondestructive quantitative XPS imaging of depth distribution of atoms on the nanoscale

Surface and Interface Analysis

Volumn 40, Issue 3-4, 2008, Pages 688-691

  Hajati, Shaaker ^a,b   Coultas, Sarah ^c   Blomfield, Chris ^c   Tougaard, Sven ^a  

^a UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

^b YASOUJ UNIVERSITY   (Iran)

^c Kratos Analytical Ltd   (United Kingdom)

Author keywords

Amount of substance (AOS); In depth distribution of atoms; XPS imaging

Indexed keywords

ALGORITHMS; IMAGING TECHNIQUES; NONDESTRUCTIVE EXAMINATION; X RAY PHOTOELECTRON SPECTROSCOPY;

AMOUNT OF SUBSTANCE (AOS); IN-DEPTH DISTRIBUTION OF ATOMS;

SURFACE ANALYSIS;

EID: 42449109220     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2633     Document Type: Conference Paper

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