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Volumn 24, Issue 1, 2010, Pages 5-12

Tribology issues in nanoimprint lithography

Author keywords

Adhesion; Deformation; Fracture; Friction; Nanoimprint lithography

Indexed keywords

EXPERIMENTAL RESEARCH; FRICTION FORCE; MECHANICAL CONTACT; MICROSCALE STRUCTURES; NANOFABRICATION; NANOFABRICATION TECHNIQUES; PATTERN TRANSFERS; SEPARATION PROCESS;

EID: 77949641893     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12206-009-1216-4     Document Type: Review
Times cited : (40)

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