Fluorinated diamond-like carbon coating as antisticking layer on nanoimprint mold

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 45, Issue 33-36, 2006, Pages

  Nakamatsu, Ken Ichiro ^a,b   Yamada, Noriko ^a   Kanda, Kazuhiro ^a   Haruyama, Yuichi ^a   Matsui, Shinji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

Author keywords

Antisticking layer; Chemical vapor deposition; Fluorinated diamond like carbon (F DLC); High hardness; Lithography; Low surface energy; Nanoimprint

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONTACT ANGLE; LITHOGRAPHY; NANOTECHNOLOGY; SELF ASSEMBLY; THERMOANALYSIS;

ANTISTICKING LAYER; FLUORINATED DIAMOND-LIKE CARBON (F-DLC); HIGH HARDNESS; LOW SURFACE ENERGY; NANOIMPRINT;

DIAMOND LIKE CARBON FILMS;

EID: 33748763897     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.L954     Document Type: Article

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