Adhesion between template materials and UV-cured nanoimprint resists

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1179-1185

  Houle, F A ^a   Guyer, Eric ^b   Miller, D C ^a   Dauskardt, Reinhold ^b  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRACTURE; MOLECULAR INTERACTIONS; ULTRAVIOLET RADIATION;

GLASS ORGANIC INTERFACE; INTERFACIAL FRACTURE ENERGIES; SURFACE INTERACTIONS;

NANOIMPRINT LITHOGRAPHY;

ADHESION; LITHOGRAPHY; ULTRAVIOLET RADIATION;

EID: 34547596835     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2746336     Document Type: Article

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