Fabrication of fluorine-doped diamond-like carbon stamps for UV nanoimprint lithography

Nanotechnology

Volumn 17, Issue 18, 2006, Pages 4659-4663

  Altun, A O ^a   Jeong, J H ^a   Rha, J J ^a   Choi, D G ^a   Kim, K D ^a   Lee, E S ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; CONTACT ANGLE; DOPING (ADDITIVES); FLUORINE; LITHOGRAPHY; NANOTECHNOLOGY; POLYMETHYL METHACRYLATES; ULTRAVIOLET RADIATION;

ANTI-ADHESION LAYER COATINGS; DIAMOND-LIKE CARBON (F-DLC) STAMPS; STAMP MATERIALS; ULTRAVIOLET (UV) NANOIMPRINT LITHOGRAPHY;

DIAMOND LIKE CARBON FILMS;

EID: 33748342947     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/18/022     Document Type: Article

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