Antistiction layers for nano imprinting lithography

Nanomanufacturing Handbook

Volumn , Issue , 2017, Pages 183-215

  Cha, Nam Goo ^a   Park, Jin Goo ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-STICTION LAYERS; CONVENTIONAL PHOTOLITHOGRAPHY; FEATURE SIZES; NANO IMPRINTING; NANO-FABRICATION METHODS; NANO-IMPRINT; PLASTIC SUBSTRATES; THREE COMPONENT;

EID: 77249168302     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1201/9781420004922-9     Document Type: Chapter

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