Deposition of PTFE thin films by ion beam sputtering and a study of the ion bombardment effect

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 135, Issue 1-4, 1998, Pages 512-516

  He, J L ^a   Li, W Z ^a   Wang, L D ^a   Wang, J ^a   Li, H D ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Ion beam assisted deposition; Ion beam bombardment; Ion beam sputtering; Polymer; PTFE

Indexed keywords

ABSORPTION SPECTROSCOPY; FILM GROWTH; FILM PREPARATION; INFRARED SPECTROSCOPY; ION BEAMS; ION BOMBARDMENT; POLYTETRAFLUOROETHYLENES; SPUTTER DEPOSITION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ION BEAM ASSISTED DEPOSITION;

PLASTIC FILMS;

EID: 0032472736     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00630-7     Document Type: Article

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