Deposition of diamond-like carbon film on phase-change optical disk by PECVD

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 1, 2005, Pages 24-31

  Ueng, H Y ^a   Guo, C T ^a,b  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^b Tainan Science Based Industrial Park   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; OPTICAL RECORDING; OPTICAL SYSTEMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCARBONATES; RAMAN SPECTROSCOPY; REFLECTION; SURFACE ROUGHNESS;

OPTICAL DISK; THERMAL SHOCK TEST;

DIAMOND LIKE CARBON FILMS;

EID: 31144473841     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1835274     Document Type: Article

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