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Volumn 208, Issue 1-4, 2003, Pages 35-39

VUV and IR spectroellipsometric studies of polymer surfaces

Author keywords

Depth profiles; Infrared spectroscopic ellipsometry; Optical anisotropy; Polymers; Vacuum ultraviolet; Visible

Indexed keywords

ANISOTROPY; ELECTROMAGNETIC DISPERSION; ELLIPSOMETRY; INFRARED SPECTROSCOPY; LIGHT ABSORPTION; MICROSTRUCTURE; SURFACE CHEMISTRY; ULTRAVIOLET RADIATION;

EID: 0038825335     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00983-2     Document Type: Conference Paper
Times cited : (13)

References (24)
  • 6
    • 20244371618 scopus 로고    scopus 로고
    • U.S. Patent # 5,872,630 A2, 1999
    • B.D. Johs, U.S. Patent # 5,872,630 A2, 1999.
    • Johs, B.D.1
  • 22
    • 20244380714 scopus 로고    scopus 로고
    • Proceedings of the conference on optical microlithography XV
    • Society for Photo-optical and Instrumentation Engineers, Bellingham, WA
    • Proceedings of the Conference on Optical Microlithography XV, SPIE 4691, Society for Photo-optical and Instrumentation Engineers, Bellingham, WA, 2002.
    • (2002) SPIE , vol.4691


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.