Friction and fracture properties of polysilicon coated with self-assembled monolayers

Wear

Volumn 260, Issue 1-2, 2006, Pages 209-214

  Ding, J N ^a   Wong, P L ^b   Yang, J C ^a  

^a JIANGSU UNIVERSITY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Mechanical properties; Microtribological properties; Self assembled monolayers; Stiction

Indexed keywords

FRICTION; MICROELECTROMECHANICAL DEVICES; SELF ASSEMBLY; SENSORS; STICTION; WEAR OF MATERIALS;

MICROTENSILE TESTS; MICROTRIBOLOGICAL PROPERTIES;

POLYSILICON;

COATING; FRACTURE; WEAR RESISTANCE;

EID: 25144487735     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2005.02.060     Document Type: Article

References (13)

1. S.Z. Wen, and J.N. Ding Study on the fundamental design issues of microelectromechanical systems (MEMS) Chin. J. Mechan. Eng. 36 2000 39 42
2. C.H. Mastrangelo Adhesion-related failure mechanisms in micromechanical devices Tribo. Lett. 3 1997 223 238
3. I. Amato Formenting a revolution in miniature Science 282 1998 402 405
4. T. Niels, S. Tonny, and J. Henri Stiction in surface micromachining J. Micromech. Microeng. 6 1996 385 397
5. J.N. Ding, Y.G. Meng, and S.Z. Wen Theoretical study on the sticking of a membrane strip in MEMS under the Casimir effect J. Micromech. Microeng. 11 2001 202 208
6. J.M. Kim, C.W. Baek, J.H. Park, D.S. Shin, Y.S. Lee, and Y.K. Kim Continuous anti-stiction coatings using self-assembled monolayers for gold microstructures J. Micromech. Microeng. 12 2002 688 695
7. J.N. Ding, Y.G. Meng, and S.Z. Wen Size effect on the mechanical properties of microfabricated polysilicon thin films J. Mater. Res. 16 2001 2223 2228
8. J.A. Schweitz, and F. Ericson Evaluation of mechanical materials properties by means of surface micromachined structures Sens. Actuat. A 74 1999 126 133
9. 2 films Sens. Actuat. A 82 2000 286 290
10. J.N. Ding, Y.G. Meng, and S.Z. Wen Magnetic-coil force actuator for microtensile test device Chin. J. Sci. Instr. 21 2000 440 446
11. R. Maboudian, W.R. Ashurst, and C. Carraro Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments Sens. Actuat. A 82 2000 219 223
12. J.A. Connally, and S.B. Brown Slow crack growth in single-crystal silicon Science 256 1992 1537 1539
13. C.H. Mastrangelo, C.H. Hsu, A simple experimental technique for the measurement of the work of adhesion of microstructures, in: IEEE Solid-State Sensor and Actuator Workshop (Cat. No. 92TH0403-X), IEEE, New York, 1992, pp. 208-213.