A wet release process for fabricating slender and compliant suspended micro-mechanical structures

Sensors and Actuators, A: Physical

Volumn 103, Issue 1-2, 2003, Pages 202-212

  Pamidighantam, S ^a   Laureyn, W ^a   Rusu, C ^a   Baert, K ^a   Puers, R ^b   Tilmans, H A C ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Compliance; Contact angle; DTS; SAM; Slenderness ratio; Stiction; Surface micro machining

Indexed keywords

ADHESION; ALUMINUM; GLASS; POLYCRYSTALLINE MATERIALS; POLYSILICON; SELF ASSEMBLY; SUBSTRATES;

MICRO-MECHANICAL STRUCTURES;

COMPOSITE MICROMECHANICS;

EID: 0037439025     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00350-3     Document Type: Conference Paper

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