Innovative plasma diagnostics and control of process in reactive low-temperature plasmas

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1395-1399

  Klick, M ^a   Kammeyer, M ^a   Rehak, W ^a   Kasper, W ^b   Awakowicz, P ^b   Franz, G ^c  

^a Adolf Slaby Institut   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^c SIEMENS AG   (Germany)

Author keywords

Low temperature plasmas; Plasma diagnostics

Indexed keywords

EID: 0040798397     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00261-2     Document Type: Article

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