Dual-beam focused ion beam/electron microscopy processing and metrology of redeposition during ion-surface 3D interactions, from micromachining to self-organized picostructures

Journal of Physics Condensed Matter

Volumn 21, Issue 22, 2009, Pages

  Moberlychan, Warren J ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3-D PARAMETER; 3D INTERACTIONS; ANGLE OF INCIDENCE; DUAL-BEAM; FOCUSED ION BEAM SPUTTERING; ION EROSION; ION IMPINGING; REDEPOSITION; SELF-ASSEMBLY OF NANOSTRUCTURES; SELF-ORGANIZED; SMALL HOLE;

ASPECT RATIO; COMPOSITE MICROMECHANICS; ELECTRON BEAMS; FOCUSED ION BEAMS; MICROMACHINING; NANOSTRUCTURES; SPUTTERING; THREE DIMENSIONAL;

IONS;

EID: 66249119735     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/21/22/224013     Document Type: Article

References (87)

1. Sigmund P 1973 J. Mater. Sci. 8 1545
2. Chason E et al 1997 Appl. Phys. Rev. 81 6513
3. Nordlund K, Ghaly M and Averback R S 1998 J. Appl. Phys. 83 1238
4. Giannuzzi L A and Stevie F A 2005 Introduction to FIB (New York: Springer)
5. Aziz M J 2006 Matematisk-Fysiske Meddelelser/udg. af Det Kongelige Danske Videnskabernes Selskab Ion'06 Proc. vol 52 ed P Sigmund p187
6. Williams J S and Poate J M (ed) 1984 Ion Implantation and Beam Processing (New York: Academic)
7. Appleton B R, Holland O W, Narayan J, Schow O E, Williams J S, Short K T and Lawson E 1982 Appl. Phys. Lett. 41 711
8. Sigmund P 1969 Phys. Rev. 184 383
9. Harper J M E, Cuomo J J and Kaufman H R 1982 J. Vac. Sci. Technol. 21 737
10. Averback R S, Diaz de la Rubia T and Benedek R 1988 Nucl. lnstrum. Methods B 33 693
11. Colligon J S 1991 Mater. Sci. Eng. 139 199
12. Cuenat A and Aziz M J 2002 Mater. Res. Soc. Symp. Proc. 696 N2.8
13. Chen H H, Urquidez O A, Ichim S, Rodriguez L H, Brenner M P and Aziz M J 2005 Science 310 294
14. Orloff J, Utlaut M and Swanson L 2003 High Resolution FIB and its Applications (New York: Kluwer Academic/Plenum)
15. Melngailis J 1987 J. Vac. Sci. Technol. B 5 469
16. Stevie F A, Shane T C, Kahora P M, Hull R, Bahnck D, Kannan V C and David E 1995 Surf. Interface Anal. 23 61
17. Mayer J, Giannuzzi L A, Kamino T and Michael J 2007 MRS Bull. 32 400
18. Volkert C A and Minor A M 2007 MRS Bull. 32 389
19. MoberlyChan W J, Adams D P, Aziz M J, Hobler G and Schenkel T 2007 MRS Bull. 32 424
20. Facsko S, Dekorsy T, Koerdt C, Trappe C, Kurz H, Vogt A and Hartnagel H L 1999 Science 85 1551
21. Cuerno R and Barabsi A-L 1995 Phys. Rev. Lett. 74 4746
22. Langford R, Nellen P M, Gierak J and Fu Y 2007 MRS Bull. 32 417
23. Carter G and Vishnyakov V 1996 Phys. Rev. B 54 17647
24. Giannuzzi L A et al 1997 Specimen preparation for TEM Mater. Res. Soc. Symp. Proc. 480 19
25. Bradley R M and Harper J M E 1988 J. Vac. Sci. Technol. A 6 2390
26. Erlebacher J, Aziz M J, Chason E, Sinclair M B and Floro J A 1999 Phys. Rev. Lett. 82 2330
27. Tersoff J 1996 Phys. Rev. Lett. 76 1675
28. Gray J L, Atha S, Hull R and Floro J A 2004 Nano Lett. 4 2447
29. Aziz M J, Floro J A, Mayer S G and Umbach C C (ed) 2007 Nanoscale pattern formation Mater. Res. Soc. Symp. Proc. 1059E
30. Ziegler J F, Biersack J P and Littmark U 1985 The Stopping and Range of Ions in Solids (New York: Pergamon)
31. SRIM program www.srim.org
32. Lugstein A, Brezna W, Hobler G and Bertagnolli E 2003 J. Vac. Sci. Technol. A 21 1644
33. MoberlyChan W J, Felter T E and Wall M A 2006 Microsc. Today 14 28
34. MoberlyChan W J and Schalek R 2007 Nanoscale pattern formation Mater. Res. Soc. Symp. Proc. 1059E KK1-7
35. Matthes A, Schmidl F, Barholz K-U, Elschner F, Schneidewind H and Seidel P 1995 Supercond. Sci. Technol. 8 676
36. Schenkel T, Radmilovic V, Stach E A, Park S J and Persaud A 2003 J. Vac. Sci. Technol. B 21 2720
37. MoberlyChan W J 2006 Self assembly of nanostructures aided by ion or photon-beam irradiation Mater. Res. Soc. Symp. Proc. 960E N10-2
38. Russell P E, Stark T J, Griffis D P, Phillips J R and Jarausch K F 1998 J. Vac. Sci. Technol. B 16 2494
39. Adams D P, Vasile M J, Mayer T M and Hodges V C 2003 J. Vac. Sci. Technol. B 21 2334
40. Broers A N, Hoole A C F and Ryan J M 1996 Microelectron. Eng. 32 131
41. Biance A-L et al 2006 Microelectron. Eng. 83 1474
42. Zhou J 2006 Int. J. Precis. Eng. Manuf. 7 18
43. Adams D P, Patterson N, Hodges C, Vasile M, Michael J and Kotula P 2008 Focused ion beams for materials characterization and micromachining Mater. Res. Soc. Symp. Proc. 1089E Y1-4
44. Kempshall B W, Schwarz S M, Prenitzer B I, Giannuzzi L A, Irwin R B and Stevie F A 2001 J. Vac. Sci. Technol. B 19 749
45. Mayer T M, Chason E and Howard A J 1994 J. Appl. Phys. 76 1634
46. Ichim S and Aziz M J 2005 J. Vac. Sci. Technol. B 23 1068
47. Brown A D, Erlebacher J, Chan W L and Chason E 2005 Phys. Rev. Lett. 95 056101
48. Mayer T M, Adams D P, Vasile M J and Archuleta K M 2005 J. Vac. Sci. Technol. A 23 1579
49. Castro M, Cuerno R, Vazquez L and Gago R 2005 Phys. Rev. Lett. 94 016102-05
50. MoberlyChan W J 2007 Microsc. Microanal. 13 598
51. Diaz de la Rubia T, Averback R S, Benedek R and King W E 1987 Phys. Rev. Lett. 59 1930
52. Zepada-Ruis L 2008 Focused ion beams for materials characterization and micromachining Mater. Res. Soc. Symp. Proc. 1089E Y5-2
53. Pellerin J G, Griffis D P and Russell P E 1990 J. Vac. Sci. Technol. B 8 1945
54. Vasile M J, Xie J and Nassar R 1999 J. Vac. Sci. Technol. B 17 3085
55. Barber D J, Frank F C, Moss M, Steeds J W and Tsong I S T 1973 J. Mater. Sci. 8 1030
56. Carter G, Colligon J S and Nobes M J 1973 J. Mater. Sci. 8 1473
57. Marzik J V, Croft W J, Staples R J and MoberlyChan W J 2006 Electron microscopy across hard and soft materials Mater. Res. Soc. Symp. Proc. 982E KK7-16
58. Marshall A F, (laboratory class), Park S I, Marshall A F, Hammond R H, Geballe T H and Talvacchio J 1987 J. Mater. Res. 2 446
59. MoberlyChan W J, Sanchez E, Stark P and Krug J 2003 Microscopy 9 856
60. Tiller W A 1991 The Science of Crystallization vol II (Cambridge: Cambridge University Press)
61. Siwy Z and Fuliski A 2002 Phys. Rev. Lett. 89 198103
62. Gierak J et al 2008 Focused ion beams for materials characterization and micromachining Mater. Res. Soc. Symp. Proc. 1089E Y3-1
63. Davidovitch B, Aziz M J and Brenner M P 2007 Phys. Rev. B 76 205420-1012
64. Aziz M J 2008 personal communications
65. Adams D P 2008 personal communications
66. Adams D P, Vasile M J and Mayer T M 2006 J. Vac. Sci. Technol. B 24 1766
67. Williams D B and Carter C B 1996 Transmission Electron Microscopy (New York: Plenum)
68. Isabell T C, Fischione P E, O'Keefe C, Guruz M U and Dravid V P 1999 Microsc. Microanal. 1999 5 126
69. Adams D P and Vasile M J 2006 J. Vac. Sci. Technol. B 24 836
70. Zepada-Ruiz L and MoberlyChan W J 2008 in preparation
71. Notte J et al 2006 SCANNING Proc. (Mahwah, NJ: FAMS)
72. Datta A, Wu Y R and Wang Y L 2001 Phys. Rev. B 63 125407
73. Habenicht S, Bolse W, Lieb K P, Reimann K and Geyer U 1999 Phys. Rev. B 60 R2200-3
74. Stanishevsky A 2001 Thin Solid Films 398 560-5
75. Biederman H, Slavinska D, Boldyreva H, Lehmberg H, Takaoka G, Matsuo J, Kinpara H and Zemek J 2001 J. Vac. Sci. Technol. B 19 1068
76. de Wintera D A M and Mulders J J L 2007 J. Vac. Sci. Technol. B 25 2215
77. Kustner M, Eckstein W, Hechtl E and Roth J 1999 J. Nucl. Mater. 265 22
78. Facsko S, Bobek T, Stahl A, Kurz H and Dekorsy T 2004 Phys. Rev. B 69 153412
79. Vogel S and Linz S J 2006 Europhys. Lett 76 884
80. Harriott L R 1995 Japan. J. Appl. Phys. 1 33 7094
81. Habenicht S, Lieb K P, Koch J and Wieck A D 2004 Phys. Rev. B 65 115327
82. Chan W L and Chason E 2007 J. Appl Phys. 101 121301-46
83. MoberlyChan W J and Dorsey P 2003 J. Eur. Ceram. Soc. 23 2879
84. Morimoto H et al 1996 Japan. J. Appl. Phys. 35 6623
85. Morse J, Park H G, Tang V and MoberlyChan W J 2008 J. Vac. Sci. Technol. submitted
86. Dubner A D, Wagner A, Melngailis J and Thompson C V 1991 J. Appl. Phys. 70 665
87. Young R J and Puretz J 1995 J. Vac. Sci. Technol. B 13 2576