Electron-beam-induced deposition of Pt for field emitter arrays

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 12 SUPPL. B, 1996, Pages 6623-6625

  Morimoto, Hiroji ^a   Kishimoto, Takehisa ^a   Takai, Mikio ^a   Yura, Shinsuke ^b   Hosono, Akihiko ^b   Okuda, Soichiro ^b   Lipp, Stephan ^c   Frey, Lothar ^c   Ryssel, Heiner ^c  

^a OSAKA UNIVERSITY   (Japan)

^b MITSUBISHI ELECTRIC CORPORATION   (Japan)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Electron beam induced deposition; Field emission; Field emitter array; Focused ion beam; Vacuum microelectronics

Indexed keywords

EID: 0007894698     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.6623     Document Type: Article

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