-
1
-
-
48949105937
-
-
International Technology Roadmap for Semiconductors (2006) (http://public.itrs.net).
-
(2006)
-
-
-
4
-
-
19944430636
-
-
G. Bersuker, C. Young, J. Barnett, N. Moumen, J. Peterson, P. Lysaght, G. A. Brown, P. M. Zeitzoff, M. Gardner, R. W. Murto, and H. R. Huff, Mat. Res. Soc. Symp. Proc. 811, 31 (2004).
-
(2004)
Mat. Res. Soc. Symp. Proc
, vol.811
, pp. 31
-
-
Bersuker, G.1
Young, C.2
Barnett, J.3
Moumen, N.4
Peterson, J.5
Lysaght, P.6
Brown, G.A.7
Zeitzoff, P.M.8
Gardner, M.9
Murto, R.W.10
Huff, H.R.11
-
5
-
-
48949089831
-
-
Helsinki
-
B. Foran, P. Lysaght, M. Campin, T. Rhoad, G. Bersuker, S. Stemmer, and M. Agustin, Atomic Layer Deposition Conference, Helsinki (2004).
-
(2004)
Atomic Layer Deposition Conference
-
-
Foran, B.1
Lysaght, P.2
Campin, M.3
Rhoad, T.4
Bersuker, G.5
Stemmer, S.6
Agustin, M.7
-
8
-
-
48949091512
-
-
Z. Ren, M. V. Fischetti, E. P. Gusev, E. A. Cartier, and M. Chudzik, Electron Devices Meeting, 2003, IEDM '03 Technical Digest (2003), pp. 33.2.1-33.2.4.
-
Z. Ren, M. V. Fischetti, E. P. Gusev, E. A. Cartier, and M. Chudzik, Electron Devices Meeting, 2003, IEDM '03 Technical Digest (2003), pp. 33.2.1-33.2.4.
-
-
-
-
9
-
-
4544337426
-
Electron Devices Meeting, 2003
-
S. Datta, G. Dewey, M. Doczy, B. S. Doyle, B. Jin, J. Kavalieros, R. Kotlyar, M. Metz, N. Zelick, and R. Chan, Electron Devices Meeting, 2003, IEDM '03 Technical Digest (2003), pp. 28.1-28.3.
-
(2003)
IEDM '03 Technical Digest
-
-
Datta, S.1
Dewey, G.2
Doczy, M.3
Doyle, B.S.4
Jin, B.5
Kavalieros, J.6
Kotlyar, R.7
Metz, M.8
Zelick, N.9
Chan, R.10
-
11
-
-
0033312006
-
-
A. Asenov, A. R. Brown, J. H. Davies, and S. Saini, IEEE Trans. Computer-Aided Design of Integrated Circuits and Systems. 18, 1558 (1999).
-
(1999)
IEEE Trans. Computer-Aided Design of Integrated Circuits and Systems
, vol.18
, pp. 1558
-
-
Asenov, A.1
Brown, A.R.2
Davies, J.H.3
Saini, S.4
-
13
-
-
0001171298
-
-
S. Uma, A. D. McConnell, M. Asheghi, K. Kurabayashi, and K. E. Goodson, Journal of Thermophysics 22, 605 (2001).
-
(2001)
Journal of Thermophysics
, vol.22
, pp. 605
-
-
Uma, S.1
McConnell, A.D.2
Asheghi, M.3
Kurabayashi, K.4
Goodson, K.E.5
-
14
-
-
33751433581
-
-
G. Roy, F. Adamu-Lema, A. R. Brown, S. Roy, and A. Asenov, Proc. European Solid-State Device Research Conference (ESSDERC) (2005), p. 337.
-
(2005)
Proc. European Solid-State Device Research Conference (ESSDERC)
, pp. 337
-
-
Roy, G.1
Adamu-Lema, F.2
Brown, A.R.3
Roy, S.4
Asenov, A.5
-
15
-
-
33947265310
-
-
G. Roy, A. R. Brown, F. Adamu-Lema, S. Roy, and A. Asenov, IEEE Trans. Electron Devices 53, 3063 (2006).
-
(2006)
IEEE Trans. Electron Devices
, vol.53
, pp. 3063
-
-
Roy, G.1
Brown, A.R.2
Adamu-Lema, F.3
Roy, S.4
Asenov, A.5
-
16
-
-
0029346737
-
-
R. M. Feenstra, M. A. Lutz, F. Stem, K. Ismail, P. M. Mooney, F. K. LeGoues, C. Stanis, J. O. Chu, and B. S. Meyerson, J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. 13, 1608 (1995).
-
(1995)
J. Vac. Sci. Technol. B, Microelectron. Process. Phenom
, vol.13
, pp. 1608
-
-
Feenstra, R.M.1
Lutz, M.A.2
Stem, F.3
Ismail, K.4
Mooney, P.M.5
LeGoues, F.K.6
Stanis, C.7
Chu, J.O.8
Meyerson, B.S.9
-
17
-
-
23744478184
-
-
G. Bersuker, P. Zeitzoff, J. H. Sim, B. H. Lee, R. Choi, G. Brown, and C. D. Young, Appl. Phys. Lett. 87, 042905 (2005).
-
(2005)
Appl. Phys. Lett
, vol.87
, pp. 042905
-
-
Bersuker, G.1
Zeitzoff, P.2
Sim, J.H.3
Lee, B.H.4
Choi, R.5
Brown, G.6
Young, C.D.7
-
21
-
-
14844334514
-
-
J. R. Watling, L. Yang, M. Boriçi, J. R. Barker, and A. Asenov, J. Comput. Electronics 2, 475 (2003).
-
(2003)
J. Comput. Electronics
, vol.2
, pp. 475
-
-
Watling, J.R.1
Yang, L.2
Boriçi, M.3
Barker, J.R.4
Asenov, A.5
-
32
-
-
2342561168
-
-
J. R. Watling, L. Yang, A Boriçi, R. C. W. Wilkins, A. Asenov, J. R. Barker, and S. Roy, Solid-State Electron. 48, 1337 (2004).
-
(2004)
Solid-State Electron
, vol.48
, pp. 1337
-
-
Watling, J.R.1
Yang, L.2
Boriçi, A.3
Wilkins, R.C.W.4
Asenov, A.5
Barker, J.R.6
Roy, S.7
-
34
-
-
0001275769
-
-
S. M. Goodnick, D. K. Ferry, C. W. Wilmsen, Z. Lifiental, D. Fathy, and O. L. Krivanek, Phys. Rev. B 32, 8171 (1985).
-
(1985)
Phys. Rev. B
, vol.32
, pp. 8171
-
-
Goodnick, S.M.1
Ferry, D.K.2
Wilmsen, C.W.3
Lifiental, Z.4
Fathy, D.5
Krivanek, O.L.6
-
35
-
-
1942482600
-
-
M. Boriçi, J. R. Watling, R. Wilkins, and J. R. Barker, Journal of Computational Electronics 2, 163 (2003).
-
(2003)
Journal of Computational Electronics
, vol.2
, pp. 163
-
-
Boriçi, M.1
Watling, J.R.2
Wilkins, R.3
Barker, J.R.4
-
36
-
-
0028747841
-
-
S. Takagi, A. Toriumi, M. Iwase, and H. Tango, IEEE T. Electron Dev. 41, 2357 (1994).
-
(1994)
IEEE T. Electron Dev
, vol.41
, pp. 2357
-
-
Takagi, S.1
Toriumi, A.2
Iwase, M.3
Tango, H.4
-
37
-
-
29244435059
-
-
P. Palestri, D. Esseni, S. Eminente, C. Fiegna, E. Sangiorgi, and L. Selmi, IEEE Trans. Electron Dev. 52, 2727 (2005).
-
(2005)
IEEE Trans. Electron Dev
, vol.52
, pp. 2727
-
-
Palestri, P.1
Esseni, D.2
Eminente, S.3
Fiegna, C.4
Sangiorgi, E.5
Selmi, L.6
-
38
-
-
29244485621
-
-
S. Eminente, D. Esseni, P. Palestri, C. Fiegna, L. Selmi, and E. Sangiorgi, IEEE Trans. Electron Dev. 52, 2736 (2005).
-
(2005)
IEEE Trans. Electron Dev
, vol.52
, pp. 2736
-
-
Eminente, S.1
Esseni, D.2
Palestri, P.3
Fiegna, C.4
Selmi, L.5
Sangiorgi, E.6
-
41
-
-
18144423189
-
-
E. Bonera, G. Scarel, M. Fanciulli, P. Delugas, and V. Fiorentini, Phys. Rev. Lett. 94, 027602 (2005).
-
(2005)
Phys. Rev. Lett
, vol.94
, pp. 027602
-
-
Bonera, E.1
Scarel, G.2
Fanciulli, M.3
Delugas, P.4
Fiorentini, V.5
-
43
-
-
29744440653
-
-
A. A. Knizhnik, I. M. Iskandarova, A. A. Bagatur'yants, B. V. Potapkin, L. R. C. Fonseca, and A. Korkin, Phys. Rev. B 72, 235329 (2005).
-
(2005)
Phys. Rev. B
, vol.72
, pp. 235329
-
-
Knizhnik, A.A.1
Iskandarova, I.M.2
Bagatur'yants, A.A.3
Potapkin, B.V.4
Fonseca, L.R.C.5
Korkin, A.6
-
44
-
-
0042848701
-
-
S. Ohmi, C. Kobayashi, I. Kashiwagi, C. Ohshima, H. Ishiwara, and H. Iwai, J. Electrochem. Soc. 150, F134 (2003).
-
(2003)
J. Electrochem. Soc
, vol.150
-
-
Ohmi, S.1
Kobayashi, C.2
Kashiwagi, I.3
Ohshima, C.4
Ishiwara, H.5
Iwai, H.6
-
45
-
-
34247347073
-
IEDM 05
-
M. H. Evans, M. Caussanel, R. D. Schrimpf, and S. T. Pantelides, IEDM 05 Tech. Dig. (2005), p. 611.
-
(2005)
Tech. Dig
, pp. 611
-
-
Evans, M.H.1
Caussanel, M.2
Schrimpf, R.D.3
Pantelides, S.T.4
-
46
-
-
33845879329
-
-
Tokyo
-
A. R. Brown, J. R. Watling, A. Asenov, G. Bersuker, and P. Zeitzoff, SISPAD 05 Proceedings, Tokyo (2005), pp. 27-30.
-
(2005)
SISPAD 05 Proceedings
, pp. 27-30
-
-
Brown, A.R.1
Watling, J.R.2
Asenov, A.3
Bersuker, G.4
Zeitzoff, P.5
-
49
-
-
33751099033
-
-
G. Bersuker, P. S. Lysaght, C. S. Park, J. Barnett, C. D. Young, P. D. Kirsch, R. Choi, B. H. Lee, B. Foran, K. van Benthem, S. J. Pennycook, P. M. Lenahan, and J. T. Ryan, J. Appl. Phys. 100, 094108 (2006).
-
(2006)
J. Appl. Phys
, vol.100
, pp. 094108
-
-
Bersuker, G.1
Lysaght, P.S.2
Park, C.S.3
Barnett, J.4
Young, C.D.5
Kirsch, P.D.6
Choi, R.7
Lee, B.H.8
Foran, B.9
van Benthem, K.10
Pennycook, S.J.11
Lenahan, P.M.12
Ryan, J.T.13
-
50
-
-
48949083695
-
IEDM 04
-
A. Callegari, P. Jamison, E. Carrier, S. Zafar, E. Gusev, V. Narayanan, C. D'Emic, D. Lacey, E A Feely, R. Jammy, M. Gribelyuk, J. Shepard, W. Andreoni, A. Curioni, and C. Pignedoli, IEDM 04 Tech. Dig. (2004), p. 825.
-
(2004)
Tech. Dig
, pp. 825
-
-
Callegari, A.1
Jamison, P.2
Carrier, E.3
Zafar, S.4
Gusev, E.5
Narayanan, V.6
D'Emic, C.7
Lacey, D.8
Feely, E.A.9
Jammy, R.10
Gribelyuk, M.11
Shepard, J.12
Andreoni, W.13
Curioni, A.14
Pignedoli, C.15
-
51
-
-
15844392029
-
-
T. Emoto, K. Akimoto, Y. Yoshida, A. Ichimiya, T. Nabatame, and A. Toriumi, Appl. Surf. Sci. 244, 55 (2005).
-
(2005)
Appl. Surf. Sci
, vol.244
, pp. 55
-
-
Emoto, T.1
Akimoto, K.2
Yoshida, Y.3
Ichimiya, A.4
Nabatame, T.5
Toriumi, A.6
-
52
-
-
33646122201
-
-
88, 152907-1-3
-
D. Heh, C. D. Young, G. A. Brown, P. Y. Hung, A. Diebold, G. Bersuker, E. M. Vogel, and J. B. Bernstein, Appl. Phys. Lett. 88, 152907-1-3 (2006).
-
(2006)
Appl. Phys. Lett
-
-
Heh, D.1
Young, C.D.2
Brown, G.A.3
Hung, P.Y.4
Diebold, A.5
Bersuker, G.6
Vogel, E.M.7
Bernstein, J.B.8
-
53
-
-
0037116096
-
-
66, 2 333 091-1-4
-
J.-H. Lee, N. Miyata, M. Kundu, and M. Ichikawa, Phys. Rev. B 66, 2 333 091-1-4 (2002).
-
(2002)
Phys. Rev. B
-
-
Lee, J.-H.1
Miyata, N.2
Kundu, M.3
Ichikawa, M.4
-
54
-
-
19944430988
-
-
G. Bersuker, J. Barnett, N. Moumen, B. Foran, C. D. Young, P. Lysaght, J. Peterson, B. H. Lee, P. M. Zeitzoff, and H. R. Huff, Jpn. J. Appl. Phys. 43, 7899 (2004).
-
(2004)
Jpn. J. Appl. Phys
, vol.43
, pp. 7899
-
-
Bersuker, G.1
Barnett, J.2
Moumen, N.3
Foran, B.4
Young, C.D.5
Lysaght, P.6
Peterson, J.7
Lee, B.H.8
Zeitzoff, P.M.9
Huff, H.R.10
-
56
-
-
33644613454
-
-
L. Ragnarsson, S. Severi, L. Trojman, D. P. Brunco, K. D. Johnson, A. Delabie, T. Schram, W. Tsai, G. Groeseneken, K. De Meyer, S. De Gendt, and M. Heyns, VLSI Symp. 05 Proceedings (2005), pp. 234-235.
-
(2005)
VLSI Symp. 05 Proceedings
, pp. 234-235
-
-
Ragnarsson, L.1
Severi, S.2
Trojman, L.3
Brunco, D.P.4
Johnson, K.D.5
Delabie, A.6
Schram, T.7
Tsai, W.8
Groeseneken, G.9
De Meyer, K.10
De Gendt, S.11
Heyns, M.12
-
57
-
-
14644396607
-
-
V. Capodieci, F. Wiest, T. Sulima, J. Schulze, and I. Eisele, Microelectron. Reliab. 45, 937 (2005).
-
(2005)
Microelectron. Reliab
, vol.45
, pp. 937
-
-
Capodieci, V.1
Wiest, F.2
Sulima, T.3
Schulze, J.4
Eisele, I.5
-
58
-
-
14844295022
-
-
Y. Kim, S. Ohmi, K. Tsutsui, and H. Iwai, Solid-State Electron. 49, 825 (2005).
-
(2005)
Solid-State Electron
, vol.49
, pp. 825
-
-
Kim, Y.1
Ohmi, S.2
Tsutsui, K.3
Iwai, H.4
-
60
-
-
48949089591
-
-
http://www.research.ibm.com/resources/press/strainedsilicon/.
-
-
-
-
61
-
-
48949088053
-
-
http://www.intel.com/research/silicon/micron.htm.
-
-
-
-
62
-
-
0043175310
-
-
J. Goo, Q. Xiang, Y. Takamura, H. Wang, J. Pan, F. Arasnia, E. N. Paton, P. Besser, A V. Sidorov, E. Adern, A. Lochtefeld, G. Braithwaite, M. T. Currie, R. Hammond, A T. Bulsara, and M.-R. Lin, IEEE Electron Device Lett. 24, 351 (2003).
-
(2003)
IEEE Electron Device Lett
, vol.24
, pp. 351
-
-
Goo, J.1
Xiang, Q.2
Takamura, Y.3
Wang, H.4
Pan, J.5
Arasnia, F.6
Paton, E.N.7
Besser, P.8
Sidorov, A.V.9
Adern, E.10
Lochtefeld, A.11
Braithwaite, G.12
Currie, M.T.13
Hammond, R.14
Bulsara, A.T.15
Lin, M.-R.16
-
63
-
-
0035418872
-
-
S. Takagi, T. Mizuno, N. Sugiyama, T. Tusuka, and A. Kurobe, IEICE Trans. Electron. E84-C, 1043 (2001).
-
(2001)
IEICE Trans. Electron
, vol.E84-C
, pp. 1043
-
-
Takagi, S.1
Mizuno, T.2
Sugiyama, N.3
Tusuka, T.4
Kurobe, A.5
-
64
-
-
0141649561
-
-
J. R. Hwang, J. H. Ho, S. M. Ting, T. P. Chen, Y. S. Hsieh, C. C. Huang, Y. Y. Chiang, H. K. Lee, A. Liu, T. A Shen, G. Braithwaite, M. Currie, N. Gerrish, R. Hammond, A. Lochtefeld, F. Singaporewala, A Bulsara, Q. Xiang, A R. Lin, W. T. Shiau, Y. T. Loh, J. K. Chen, S. C. Chien, and F. Wen, in Symp. VLSI Technol. Dig. (2003), p. 103.
-
J. R. Hwang, J. H. Ho, S. M. Ting, T. P. Chen, Y. S. Hsieh, C. C. Huang, Y. Y. Chiang, H. K. Lee, A. Liu, T. A Shen, G. Braithwaite, M. Currie, N. Gerrish, R. Hammond, A. Lochtefeld, F. Singaporewala, A Bulsara, Q. Xiang, A R. Lin, W. T. Shiau, Y. T. Loh, J. K. Chen, S. C. Chien, and F. Wen, in Symp. VLSI Technol. Dig. (2003), p. 103.
-
-
-
-
67
-
-
0034794354
-
-
K. Rim, S. Koester, A Hargrove, J. Chu, P. M. Mooney, J. Ott, T, Kanarsky, P. Ronsheim, M. Ieong, A. Grill, and H.-S. P. Wong, Proceedings Symp. on VLSI Technology (2001), pp. 59-60.
-
(2001)
Proceedings Symp. on VLSI Technology
, pp. 59-60
-
-
Rim, K.1
Koester, S.2
Hargrove, A.3
Chu, J.4
Mooney, P.M.5
Ott, J.6
Kanarsky, T.7
Ronsheim, P.8
Ieong, M.9
Grill, A.10
Wong, H.-S.P.11
-
68
-
-
0037004304
-
-
S. Inaba, K. Okano, S. Matsuda, M. Fujiwara, A. Hokazono, K. Adachi, K. Ohuchi, H. Suto, H. Fukui, T. Shimizu, S. Mori, H. Oguma, A. Murakoshi, T. Itani, T. Iinuma, T. Kudo, H. Shibata, S, Taniguchi, M. Takayanagi, A. Azuma, H. Oyamatsu, K. Suguro, Y. Katsumata, Y. Toyoshima, and H. Ishiuchi, IEEE Trans. Elec. Dev. 49, 2263 (2002).
-
(2002)
IEEE Trans. Elec. Dev
, vol.49
, pp. 2263
-
-
Inaba, S.1
Okano, K.2
Matsuda, S.3
Fujiwara, M.4
Hokazono, A.5
Adachi, K.6
Ohuchi, K.7
Suto, H.8
Fukui, H.9
Shimizu, T.10
Mori, S.11
Oguma, H.12
Murakoshi, A.13
Itani, T.14
Iinuma, T.15
Kudo, T.16
Shibata, H.17
Taniguchi, S.18
Takayanagi, M.19
Azuma, A.20
Oyamatsu, H.21
Suguro, K.22
Katsumata, Y.23
Toyoshima, Y.24
Ishiuchi, H.25
more..
-
69
-
-
48949103826
-
-
http://www.synopsys.com.
-
-
-
|