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Volumn 44, Issue 4, 1997, Pages 577-583

Scaled silicon MOSFET's: Universal mobility behavior

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; ELECTRONS; MATHEMATICAL MODELS; QUANTUM THEORY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SURFACES;

EID: 0031118623     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.563361     Document Type: Article
Times cited : (42)

References (51)
  • 1
    • 0018683243 scopus 로고
    • Characterization of the electron mobility in the inverted (100) Si Surface
    • A. G. Sabnis and J. T. Clemens, "Characterization of the electron mobility in the inverted (100) Si Surface," in IEDM Tech. Dig., 1979, pp. 18-21.
    • (1979) IEDM Tech. Dig. , pp. 18-21
    • Sabnis, A.G.1    Clemens, J.T.2
  • 2
    • 0019048875 scopus 로고
    • Electron mobility in inversion and accumulation layers on thermally oxidized silicon surfaces
    • S. C. Sun and J. D. Plummer, "Electron mobility in inversion and accumulation layers on thermally oxidized silicon surfaces," IEEE Trans. Electron Devices, vol. ED-27, pp. 1497-1508, 1980.
    • (1980) IEEE Trans. Electron Devices , vol.ED-27 , pp. 1497-1508
    • Sun, S.C.1    Plummer, J.D.2
  • 3
    • 34547827353 scopus 로고
    • Properties of semiconductor surface inversion layers in the electric quantum limit
    • F. Stern and W. E. Howard, "Properties of semiconductor surface inversion layers in the electric quantum limit," Phys. Rev., vol. 163, pp. 816-835, 1967.
    • (1967) Phys. Rev. , vol.163 , pp. 816-835
    • Stern, F.1    Howard, W.E.2
  • 4
    • 84918096120 scopus 로고
    • Scattering mechanism at low temperature mobility of MOS inversion layers
    • Y. Matsumoto and Y. Uemura, "Scattering mechanism at low temperature mobility of MOS inversion layers," Jpn. J. Appl. Phys. Suppl. 2, Pt. 2, pp. 367-370, 1974.
    • (1974) Jpn. J. Appl. Phys. Suppl. 2, Pt. 2 , pp. 367-370
    • Matsumoto, Y.1    Uemura, Y.2
  • 5
    • 0024048587 scopus 로고
    • Consideration of doping profiles in MOSFET mobility modeling
    • T. J. Krutsick and M. H. White, "Consideration of doping profiles in MOSFET mobility modeling," IEEE Trans. Electron Devices, vol. 35, pp. 1153-1155, 1988.
    • (1988) IEEE Trans. Electron Devices , vol.35 , pp. 1153-1155
    • Krutsick, T.J.1    White, M.H.2
  • 7
    • 0028747841 scopus 로고
    • On the universality of inversion layer mobility in Si MOSFET's: Part I-Effects of substrate impurity concentration
    • S. Takagi, A. Toriumi, M. Iwase, and H. Tango, "On the universality of inversion layer mobility in Si MOSFET's: Part I-Effects of substrate impurity concentration," IEEE Trans. Electron Devices, vol. 41, pp. 2357-2362, 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , pp. 2357-2362
    • Takagi, S.1    Toriumi, A.2    Iwase, M.3    Tango, H.4
  • 8
    • 0028742723 scopus 로고
    • On the universality of inversion layer mobility in Si MOSFET's: Part II - Effects of surface orientation
    • _, "On the universality of inversion layer mobility in Si MOSFET's: Part II - Effects of surface orientation," IEEE Trans. Electron Devices, vol. 41, pp. 2363-2368, 1994.
    • (1994) IEEE Trans. Electron Devices , vol.41 , pp. 2363-2368
  • 10
    • 0018491058 scopus 로고
    • Field-dependent mobility model for two-dimensional numerical analysis of MOSFET's
    • K. Yamaguchi, "Field-dependent mobility model for two-dimensional numerical analysis of MOSFET's," IEEE Trans. Electron Devices, vol. ED-26, pp. 1068-1074, 1979.
    • (1979) IEEE Trans. Electron Devices , vol.ED-26 , pp. 1068-1074
    • Yamaguchi, K.1
  • 11
    • 0024105667 scopus 로고
    • A physically based mobility model for numerical simulation of nonplanar devices
    • C. Lombardi, S. Manzini, A. Saporito, and M. Vanzi, "A physically based mobility model for numerical simulation of nonplanar devices," IEEE Trans. Computer-Aided Design, vol. 7, pp. 1164-1171, 1988.
    • (1988) IEEE Trans. Computer-Aided Design , vol.7 , pp. 1164-1171
    • Lombardi, C.1    Manzini, S.2    Saporito, A.3    Vanzi, M.4
  • 12
    • 0020783138 scopus 로고
    • Modeling of carrier mobility against carrier concentration in arsenic-, phosphorus-, and boron-doped silicon
    • G. Masetti, M. Severi, and S. Solmi, "Modeling of carrier mobility against carrier concentration in arsenic-, phosphorus-, and boron-doped silicon," IEEE Trans. Electron Devices, vol. ED-30, pp. 764-769, 1983.
    • (1983) IEEE Trans. Electron Devices , vol.ED-30 , pp. 764-769
    • Masetti, G.1    Severi, M.2    Solmi, S.3
  • 13
    • 0024684382 scopus 로고
    • A new approach to verify and derive a transverse-field dependent mobility model for electrons in MOS inversion layers
    • H. Shin, A. F. Tasch, Jr., C. M. Maziar, and S. K. Banerjee, "A new approach to verify and derive a transverse-field dependent mobility model for electrons in MOS inversion layers," IEEE Trans. Electron Devices, vol. 36, pp. 1117-1124, 1989.
    • (1989) IEEE Trans. Electron Devices , vol.36 , pp. 1117-1124
    • Shin, H.1    Tasch Jr., A.F.2    Maziar, C.M.3    Banerjee, S.K.4
  • 14
    • 0026171426 scopus 로고
    • Physically-based models for effective mobility and local-field mobility of electrons in MOS inversion layers
    • H. Shin, G. M. Yeric, A. F. Tasch, and C. M. Maziar, "Physically-based models for effective mobility and local-field mobility of electrons in MOS inversion layers," Solid-State Electron, vol. 34, pp. 545-552, 1991.
    • (1991) Solid-State Electron , vol.34 , pp. 545-552
    • Shin, H.1    Yeric, G.M.2    Tasch, A.F.3    Maziar, C.M.4
  • 15
    • 0023960507 scopus 로고
    • CMOS mobility degradation coefficients at low temperatures
    • S. A. Campbell and P. Andersen, "CMOS mobility degradation coefficients at low temperatures," Proc. Inst. Elect. Eng., vol. 135, pp. 17-19, 1988.
    • (1988) Proc. Inst. Elect. Eng. , vol.135 , pp. 17-19
    • Campbell, S.A.1    Andersen, P.2
  • 16
    • 0026852922 scopus 로고
    • Influence of high substrate doping levels on the threshold voltage and the mobility of deep-submicrometer MOSFET's
    • M. J. Van Dort, P. H. Woerlee, A. J. Walker, C. A. H. Juffermans, and H. Lifka, "Influence of high substrate doping levels on the threshold voltage and the mobility of deep-submicrometer MOSFET's," IEEE Trans. Electron Devices, vol. 39, pp. 932-938, 1992.
    • (1992) IEEE Trans. Electron Devices , vol.39 , pp. 932-938
    • Van Dort, M.J.1    Woerlee, P.H.2    Walker, A.J.3    Juffermans, C.A.H.4    Lifka, H.5
  • 18
    • 0024737720 scopus 로고
    • MOSFET scaling limits determined by subthreshold conduction
    • J. M. Pimbley and J. D. Meindl, "MOSFET scaling limits determined by subthreshold conduction," IEEE Trans. Electron Devices, vol. 36, pp. 1711-1721, 1989.
    • (1989) IEEE Trans. Electron Devices , vol.36 , pp. 1711-1721
    • Pimbley, J.M.1    Meindl, J.D.2
  • 19
    • 33747639101 scopus 로고    scopus 로고
    • private communication
    • D. Scharfetter, private communication.
    • Scharfetter, D.1
  • 20
    • 4243643733 scopus 로고
    • Polarizability of a two-dimensional electron gas
    • F. Stern, "Polarizability of a two-dimensional electron gas," Phys. Rev. Lett., vol. 18, pp. 546-548, 1967.
    • (1967) Phys. Rev. Lett. , vol.18 , pp. 546-548
    • Stern, F.1
  • 21
    • 6144269909 scopus 로고
    • Many-body corrections to the polarizability of the two-dimensional electron gas
    • P. F. Maldague, "Many-body corrections to the polarizability of the two-dimensional electron gas," Surf. Sci., vol. 73, pp. 296-302, 1978.
    • (1978) Surf. Sci. , vol.73 , pp. 296-302
    • Maldague, P.F.1
  • 22
    • 21544442115 scopus 로고
    • Temperature dependence of the conductivity for the two-dimensional electron gas: Analytical results for low temperatures
    • A. Gold and V. T. Dolgopolov, "Temperature dependence of the conductivity for the two-dimensional electron gas: Analytical results for low temperatures," Phys. Rev. B, vol. 33, pp. 1076-1084, 1986.
    • (1986) Phys. Rev. B , vol.33 , pp. 1076-1084
    • Gold, A.1    Dolgopolov, V.T.2
  • 23
    • 0004551425 scopus 로고
    • Two-subband screening and transport in (001) silicon inversion layers
    • F. Stern, "Two-subband screening and transport in (001) silicon inversion layers," Surf. Sci, vol. 73, pp. 197-205, 1978.
    • (1978) Surf. Sci , vol.73 , pp. 197-205
    • Stern, F.1
  • 24
    • 0001240061 scopus 로고
    • Intersubband scattering effect on the mobility of a Si (100) inversion layer at low temperatures
    • S. Mori and T. Ando, "Intersubband scattering effect on the mobility of a Si (100) inversion layer at low temperatures," Phys. Rev. B, vol. 19, pp. 6433-6441, 1979.
    • (1979) Phys. Rev. B , vol.19 , pp. 6433-6441
    • Mori, S.1    Ando, T.2
  • 26
    • 85032069152 scopus 로고
    • Electronic properties of two-dimensional systems
    • T. Ando, A. B. Fowler, and F. Stern, "Electronic properties of two-dimensional systems," Rev. Mod. Phys., vol. 54, pp. 437-671, 1982.
    • (1982) Rev. Mod. Phys. , vol.54 , pp. 437-671
    • Ando, T.1    Fowler, A.B.2    Stern, F.3
  • 27
    • 10644250257 scopus 로고
    • Inhomogeneous electron gas
    • P. Hohenberg and W. Kohn, "Inhomogeneous electron gas," Phys. Rev., vol. 136, pp. B864-B871, 1964.
    • (1964) Phys. Rev. , vol.136
    • Hohenberg, P.1    Kohn, W.2
  • 28
    • 0042113153 scopus 로고
    • Self-consistent equations including exchange and correlation effects
    • W. Kohn and L. J. Sham, "Self-consistent equations including exchange and correlation effects," Phys. Rev., vol. 140, pp. A1133-A1140, 1965.
    • (1965) Phys. Rev. , vol.140
    • Kohn, W.1    Sham, L.J.2
  • 29
    • 0000452993 scopus 로고
    • Diagram technique for nonequilibrium processes
    • L. V. Keldysh, "Diagram technique for nonequilibrium processes," Sov. Phys. JETP, vol. 20, pp. 1018-1026, 1965.
    • (1965) Sov. Phys. JETP , vol.20 , pp. 1018-1026
    • Keldysh, L.V.1
  • 31
    • 35949022751 scopus 로고
    • Quantum field-theoretical methods in transport theory of metals
    • J. Rammer and H. Smith, "Quantum field-theoretical methods in transport theory of metals," Rev. Mod. Phys., vol. 58, pp. 323-359, 1986.
    • (1986) Rev. Mod. Phys. , vol.58 , pp. 323-359
    • Rammer, J.1    Smith, H.2
  • 32
    • 77956698230 scopus 로고
    • Modeling of quantum transport in semiconductor devices
    • New York: Academic
    • D. K. Ferry and H. L. Grubin, "Modeling of quantum transport in semiconductor devices," Solid State Physics. New York: Academic, 1995, vol. 49, pp. 283-448.
    • (1995) Solid State Physics , vol.49 , pp. 283-448
    • Ferry, D.K.1    Grubin, H.L.2
  • 34
    • 0004999024 scopus 로고
    • Two-dimensional electron transport in semiconductor layers. I. Phonon scattering
    • P. J. Price, "Two-dimensional electron transport in semiconductor layers. I. Phonon scattering," Annu. Phys., vol. 133, pp. 217-239, 1981.
    • (1981) Annu. Phys. , vol.133 , pp. 217-239
    • Price, P.J.1
  • 35
    • 0642361958 scopus 로고
    • Hot electrons in low-dimensional structures
    • B. K. Ridley, "Hot electrons in low-dimensional structures," Rep. Prog. Phys., vol. 54, pp. 169-256, 1991.
    • (1991) Rep. Prog. Phys. , vol.54 , pp. 169-256
    • Ridley, B.K.1
  • 36
    • 4243810298 scopus 로고
    • Hot-electron effects in silicon quantized inversion layers
    • D. K. Ferry, "Hot-electron effects in silicon quantized inversion layers," Phys. Rev. B, vol. 14, pp. 5364-5371, 1976.
    • (1976) Phys. Rev. B , vol.14 , pp. 5364-5371
    • Ferry, D.K.1
  • 39
    • 4243227379 scopus 로고
    • Monte Carlo study of electron transport in silicon inversion layers
    • M. V. Fischetti and S. E. Laux, "Monte Carlo study of electron transport in silicon inversion layers," Phys. Rev. B, vol. 48, pp. 2244-2274, 1993.
    • (1993) Phys. Rev. B , vol.48 , pp. 2244-2274
    • Fischetti, M.V.1    Laux, S.E.2
  • 41
    • 84954096367 scopus 로고
    • Physics and technology of ultra short channel MOSFET devices
    • D. A. Antoniadis and J. E. Chung, "Physics and technology of ultra short channel MOSFET devices," in IEDM Tech. Dig., 1991, pp. 21-24.
    • (1991) IEDM Tech. Dig. , pp. 21-24
    • Antoniadis, D.A.1    Chung, J.E.2
  • 42
    • 0030080950 scopus 로고    scopus 로고
    • Device parameter optimization for reduced short channel effects in retrograde doping MOSFET's
    • B. Agrawal, V. K. De, and J. D. Meindl, "Device parameter optimization for reduced short channel effects in retrograde doping MOSFET's," IEEE Trans. Electron Devices, vol. 43, pp. 365-368, 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , pp. 365-368
    • Agrawal, B.1    De, V.K.2    Meindl, J.D.3
  • 43
    • 36049053545 scopus 로고
    • Quantum spectroscopy of the low-field oscillations in the surface impedance
    • R. E. Prange and T.-W. Nee, "Quantum spectroscopy of the low-field oscillations in the surface impedance," Phys. Rev., vol. 168, pp. 779-786, 1968.
    • (1968) Phys. Rev. , vol.168 , pp. 779-786
    • Prange, R.E.1    Nee, T.-W.2
  • 44
    • 49549126543 scopus 로고
    • Electron scattering in silicon inversion layers by oxide and surface roughness
    • A. Hartstein, T. H. Ning, and A. B. Fowler, "Electron scattering in silicon inversion layers by oxide and surface roughness," Surf. Sci., vol. 58, pp. 178-181, 1976.
    • (1976) Surf. Sci. , vol.58 , pp. 178-181
    • Hartstein, A.1    Ning, T.H.2    Fowler, A.B.3
  • 46
    • 0028320826 scopus 로고
    • Mesoscopic roughness characterization of grown surfaces by atomic force microscopy
    • T. Yoshinobu, A. Iwamoto, and H. Iwasaki, "Mesoscopic roughness characterization of grown surfaces by atomic force microscopy," Jpn. J. Appl. Phys., vol. 33, pp. L67-L69, 1994.
    • (1994) Jpn. J. Appl. Phys. , vol.33
    • Yoshinobu, T.1    Iwamoto, A.2    Iwasaki, H.3
  • 49
    • 0030127572 scopus 로고    scopus 로고
    • Correlation between inversion layer mobility and surface roughness measured by AFM
    • T. Yamanaka, S. J. Fang, H.-C. Lin, J. P. Snyder, and C. R. Helms, "Correlation between inversion layer mobility and surface roughness measured by AFM," IEEE Electron Device Lett., vol. 17, pp. 178-180, 1996.
    • (1996) IEEE Electron Device Lett. , vol.17 , pp. 178-180
    • Yamanaka, T.1    Fang, S.J.2    Lin, H.-C.3    Snyder, J.P.4    Helms, C.R.5
  • 50
    • 0029343992 scopus 로고
    • Calculation of the average interface field in inversion layers using zero-temperature Green's functions formalism
    • D. Vasileska, P. Bordone, T. Eldridge, and D. K. Ferry, "Calculation of the average interface field in inversion layers using zero-temperature Green's functions formalism," J. Vac. Sci. Technol. B, vol. 13, pp. 1841-1847, 1995.
    • (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1841-1847
    • Vasileska, D.1    Bordone, P.2    Eldridge, T.3    Ferry, D.K.4


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