Strained Si NMOSFETs for high performance CMOS technology

IEEE Symposium on VLSI Circuits, Digest of Technical Papers

Volumn , Issue TECHNOLOGY SYMP., 2001, Pages 59-60

  Rim, K ^a   Koester, S ^a   Hargrove, M ^a   Chu, J ^a   Mooney, P M ^a   Ott, J ^a   Kanarsky, T ^a   Ronsheim, P ^a   Ieong, M ^a   Grill, A ^a   Wong, H S P ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC CURRENTS; ELECTRON MOBILITY; PHONONS; SCATTERING; SEMICONDUCTING SILICON; STRAIN;

PHONON SCATTERING;

MOSFET DEVICES;

EID: 0034794354     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)