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Volumn 85-86, Issue , 2002, Pages 1-66

Chemistry and physics of defect interaction in semiconductors

Author keywords

Atomic defects; Extended defects; Impurity segregation; Interdefect interaction; Kinetics; Light impurities; Semiconductors; Silicon; Thermodynamics

Indexed keywords

ATOMIC PHYSICS; ATOMS; CHEMICAL PROPERTIES; COMPUTER NETWORKS; CRYSTALS; ELECTRIC CONDUCTIVITY; ELECTRONICS INDUSTRY; FLOW INTERACTIONS; HYDROGEN; IMPURITIES; MECHANICAL PROPERTIES; MICROELECTRONICS; NONMETALS; PASSIVATION; PHYSICAL PROPERTIES; SEMICONDUCTOR MATERIALS; SILICON; VACANCIES;

EID: 4243572317     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article
Times cited : (6)

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