Hydrogen and helium bubbles in silicon

Materials Science and Engineering R: Reports

Volumn 27, Issue 1, 2000, Pages 1-52

  Cerofolini, G F ^a   Corni, F ^b   Frabboni, S ^b   Nobili, C ^b   Ottaviani, G ^b   Tonini, R ^b  

^a STMICROELECTRONICS   (Italy)

^b UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; BUBBLES (IN FLUIDS); CRYSTAL DEFECTS; CRYSTAL IMPURITIES; DIFFUSION IN SOLIDS; HELIUM; HYDROGEN; ION IMPLANTATION; PRECIPITATION (CHEMICAL); PRESSURE EFFECTS; SINGLE CRYSTALS; THERMAL EFFECTS;

OUTDIFFUSION;

SEMICONDUCTING SILICON;

EID: 0034251928     PISSN: 0927796X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-796X(00)00007-3     Document Type: Article

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