Generation of vacancy-type point defects in single collision cascades during swift-ion bombardment of silicon

Physical Review B - Condensed Matter and Materials Physics

Volumn 55, Issue 16, 1997, Pages 10498-10507

  Svensson, B ^a   Jagadish, C ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001312002     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.55.10498     Document Type: Article

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