Gettering of Fe impurities by bulk stacking faults in Czochralski-grown silicon

Applied Physics Letters

Volumn 70, Issue 14, 1997, Pages 1876-1878

  Shen, B ^a   Zhang, X Y ^a   Yang, K ^a   Chen, P ^a   Zhang, R ^a   Shi, Y ^a   Zheng, Y D ^a   Sekiguchi, T ^b   Sumino, K ^b  

^a NANJING UNIVERSITY   (China)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0242403946     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118718     Document Type: Article

References (11)

1. F. Shimura, Solid State Phenom. 19/20, 1 (1991).
2. D. Gilles, E. R. Weber, and S. Hahn, Phys. Rev. Lett. 64, 196 (1990).
3. T. Y. Tan and W. K. Tice, Philos. Mag. 30, 615 (1976).
4. F. Shimura, H. Tsuya, and T. Kanamurai, J. Electrochem. Soc. 128, 1579 (1981).
5. E. R. Weber, Appl. Phys. A 30, 1 (1983).
6. T. Sekiguchi, B. Shen, T. Watanabe, and K. Sumino, Mat. Sci. Eng. B 42, 235 (1996).
7. B. Shen, T. Sekiguchi, J. Jablonski, and K. Sumino, J. Appl. Phys. 76, 4540 (1994).
8. V. Higgs, M. Goulding, A. Brinklew, and P. Kinghtley, Appl. Phys. Lett. 60, 1369 (1992).
9. D. Gilles, Solid State Phenom. 32/33, 57 (1993).
10. A. Castaldini, A. Cavallini, A. Poggi, and E. Susi, Appl. Phys. A 48, 431 (1989).
11. J. C. Milkelsen, Mater. Res. Soc. Symp. Proc. 36, 45 (1985).