Modeling of the surface annihilation of excess self-interstitials generated by gold diffusion into silicon

Materials Research Society Symposium - Proceedings

Volumn 490, Issue , 1998, Pages 111-116

  Stolwijk, N A ^a   Lerch, W ^a   Giese, A ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL ORIENTATION; GOLD; MATHEMATICAL MODELS; NUMERICAL ANALYSIS; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON; SURFACES;

KICK OUT MECHANISM; SELF INTERSTITIAL SUPERSATURATION; SPREADING RESISTANCE PROFILING; SURFACE ANNIHILATION;

DIFFUSION;

EID: 0032305646     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)