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Volumn 96, Issue 2, 2004, Pages 1094-1103

Creation of SiOF films with SiF 4/O 2 plasmas: From gas-surface interactions to film formation

Author keywords

[No Author keywords available]

Indexed keywords

LASER INDUCED FLUORESCENCE (LIF); OPTICAL EMISSION SPECTROSCOPY (OES); SIOF; SURFACE REACTIVITY;

EID: 3242714353     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1760835     Document Type: Article
Times cited : (19)

References (75)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.