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Materials Chemistry and Physics

Volumn 53, Issue 2, 1998, Pages 150-154

Effect of fluorine on moisture absorption and dielectric properties of SiOF films

(2) Lee, Seoghyeong a Park, Jong Wan a

a Hanyang University (South Korea)

Author keywords

Dielectric properties; Fluorine; Moisture absorption

Indexed keywords

BOILING LIQUIDS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRON CYCLOTRON RESONANCE; FLUORINE; MOISTURE; PERMITTIVITY; PLASMA APPLICATIONS; SILICON COMPOUNDS; WATER ABSORPTION;

GAS FLOW RATIO;

DIELECTRIC FILMS;

EID: 0032075351 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/S0254-0584(97)02067-1 Document Type: Article

Times cited : (19)

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