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Plasma Sources Science and Technology

Volumn 11, Issue 3 A, 2002, Pages

On the interplay between plasma ions, radicals and surfaces: Who dominates the interaction?

(1) Fisher, Ellen R a

a Department of Environmental and Radiological Health Sciences (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON INORGANIC COMPOUNDS; COMPOSITION EFFECTS; ETCHING; FREE RADICAL REACTIONS; ION BOMBARDMENT; MOLECULAR DYNAMICS; NITROGEN COMPOUNDS; REACTION KINETICS; SCATTERING; SILICON COMPOUNDS; SUBSTRATES; SURFACE REACTIONS;

PLASMA IONS; PLASMA PROCESSING MECHANISMS; PLASMA RADICALS; PLASMA SURFACES;

PLASMAS;

EID: 0036671927 PISSN: 09630252 EISSN: None Source Type: Journal
DOI: 10.1088/0963-0252/11/3A/316 Document Type: Conference Paper

Times cited : (30)

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