Infrared Spectroscopy Study of the Thermal Stability of Fluorinated SiO2 Thin Films

Journal of the Electrochemical Society

Volumn 148, Issue 4, 2001, Pages

  Iacona, Fabio ^a   Ceriola, Giulio ^a   Spoto, Giuseppe ^b  

^a CNR IMETEM   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002280698     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1353577     Document Type: Article

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