SCOPUS 정보 검색 플랫폼

Defect and Diffusion Forum

Volumn 230-232, Issue , 2004, Pages 199-220

Nitrogen in silicon

(2) Yang, Deren a Yu, Xuegong a

a ZHEJIANG UNIVERSITY (China)

Author keywords

Nitrogen Doping; Oxygen Precipitation; Silicon; Voids

Indexed keywords

COMPLEXATION; CRYSTAL GROWTH FROM MELT; DIFFUSION; GETTERS; MOLECULAR VIBRATIONS; NITROGEN; OXYGEN; PRECIPITATION (CHEMICAL); RAPID THERMAL ANNEALING; SEGREGATION (METALLOGRAPHY); SEMICONDUCTOR DOPING; ULSI CIRCUITS;

INTERNAL GETTERING (IG); NITROGEN DOPING; OXYGEN PRECIPITATION; VOIDS;

SEMICONDUCTING SILICON;

EID: 17144373401 PISSN: 10120386 EISSN: 16629507 Source Type: Journal
DOI: 10.4028/www.scientific.net/ddf.230-232.199 Document Type: Article

Times cited : (14)

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