Shallow thermal donor defects in silicon

Physical Review Letters

Volumn 77, Issue 5, 1996, Pages 865-868

  Ewels, C P ^a   Jones, R ^a   Oberg S ^b   Miro, J ^c   Deak P ^c  

^a UNIVERSITY OF EXETER   (United Kingdom)

^b LULEÅ UNIVERSITY OF TECHNOLOGY   (Sweden)

^c BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000969926     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.77.865     Document Type: Article

References (34)

1. T. Abe, T. Masui, H. Harada, and J. Chikawa, in VLSI Science and Technology 1985, W. M. Bullis and S. Broydo (Electrochemical Society, Pennington, NJ, 1985), p. 543.
2. H. J. Stein, Mater. Res. Soc. Symp. Proc., 59, 523 (1985).MRSPDH
3. H. Navarro, J. Griffin, J. Weber, and L. Gentzel, Solid State Commun., 58, 151 (1986).SSCOA4
4. M. Suezawa, K. Sumino, H. Harada, and T. Abe, Jpn. J. Appl. Phys., 25, L859 (1986).JJAPA5
5. M. Suezawa, K. Sumino, H. Harada, and T. Abe, Jpn. J. Appl. Phys., 27, 62 (1988).JJAPA5
6. A. Hara, T. Fukuda, T. Miyabo, and I. Hirai, Jpn. J. Appl. Phys., 28, 142 (1989).JJAPA5
7. A. Hara, L. Hirai, and A. Ohsawa, J. Appl. Phys., 67, 2462 (1990).JAPIAU
8. T. Gregorkiewicz, H. H. P. Th Bekman, and C. A. J. Ammerlaan, Phys. Rev. B, 38, 3998 (1988).PRBMDO
9. D. Yang, D. Que, and K. Sumino, J. Appl. Phys., 77, 2 (1995).JAPIAU
10. B. J. Heijmink Liesert, T. Gregorkiewicz, and C. A. J. Ammerlaan, Phys. Rev. B, 47, 7005 (1993).PRBMDO
11. J. A. Griffin, J. Hartung, J. Weber, H. Navarro, and L. Genzel, Appl. Phys. A, 48, 41 (1989).APSFDB
12. R. Jones, S. Öberg, F. Berg Rasmussen, and B. Bech Nielsen, Phys. Rev. Lett., 72, 1882 (1994).PRLTAO
13. K. L. Brower, Phys. Rev. B, 26, 6040 (1982).PRBMDO
14. H. J. Stein, Appl. Phys. Lett., 52, 153 (1988).APPLAB
15. F. Berg Rasmussen, R. Jones, and S. Öberg, Phys. Rev. B, 50, 4378 (1994).PRBMDO
16. G. D. Watkins and K. L. Brower, Phys. Rev. Lett., 36, 1329 (1976).PRLTAO
17. J. M. Trombetta and G. D. Watkins, Mater. Res. Soc. Symp. Proc., 104, 93 (1988).MRSPDH
18. R. Jones and S. Öberg, Phys. Rev. Lett., 68, 86 (1992).PRLTAO
19. W. Kürner, R. Sauer, A. Dörnen, and K. Thonke, Phys. Rev. B, 39, 13 327 (1989).PRBMDO
20. R. Jones, Philos. Trans. R. Soc. London A, 350, 189 (1995).PTRMAD
21. C. Ewels, R. Jones, and S. Öberg, Mater. Sci. Forum, 196-201, 1297 (1995). MSFOEP
22. L. C. Snyder and J. W. Corbett, in Oxygen, Carbon, Hydrogen and Nitrogen in Silicon, S. V. Pearton, J. W. Corbett, J. C. Mikkelson, Jr., and S. J. Pennycock, MRS Symposia Proceedings (Materials Research Society, Pittsburgh, 1986), p. 207. MRSPDH
23. L. C. Snyder and J. W. Corbett, in Proceedings of the 13th International Conference on Defects in Semiconductors, L. C. Kimerling and J. M. Parsey, Jr. (The Met allurgical Society of AIME, Warrendale, Pennsylvania, 1985), p. 693.
24. J. T. Borenstein, J. W. Corbett, M. Herder, S. N. Sahu, and L. C. Snyder, J. Phys. C, 19, 2893 (1986).JPSOAW
25. R. Jones, C. Ewels, J. Goss, J. Miro, P. Deák, S. Öberg, and F. Berg Rasmussen, Semicond. Sci. Technol., 9, 2145 (1994).SSTEET
26. N. S. Minaev and A. V. Mudryi, Phys. Status Solidi A, 68, 561 (1981).PSSABA
27. A. N. Safonov, E. C. Lightowlers, and G. Davies, Mater. Sci. Forum, 196-201, 909 (1995).MSFOEP
28. A. N. Safonov, E. C. Lightowlers, Gordon Davies, P. Leary, R. Jones, and S. Öberg (unpublished).
29. A. L. Endrös, Phys. Rev. Lett., 63, 70 (1989).PRLTAO
30. A. L. Endrös, W. Krüher, and J. Grabmaier, Physica (Amsterdam), 170B, 365 (1991).PHYBE3
31. Yu. V. Martinov, T. Gregorkiewicz, and C. A. J. Ammerlaan, Phys. Rev. Lett., 74, 2030 (1995).PRLTAO
32. R. Jones, S. Oberg, and A. Umerski, Mater. Sci. Forum, 65-66, 287 (1990).MSFOEP
33. Q. Sun, K. H. Yao, H. C. Gatos, and J. Lagowski, J. Appl. Phys., 71, 3760 (1992).JAPIAU
34. D. J. Chadi, preceding Letter, Phys. Rev. Lett., 77, 861 (1996).PRLTAO